# US 2016/0262255 A1 · Test board unit and apparatus for testing a semiconductor chip including the same

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- Number: US 2016/0262255 A1
- Document ID: US20160262255A1
- Status: Published application
- Kind: A1
- Application number: 14/846,053
- Filed: 2015-09-04
- Published: 2016-09-08
- Earliest claimed: 2015-03-04
- Assignees: SK hynix Inc.; Unitest Inc.
- Applicants: SK hynix Inc.; Unitest Inc.
- Inventors: Woo Sik JUNG; Byoung Seon KOH; Hyo Jin OH; Young Bae CHOI; Jin Young JUNG
- Web page: https://patentgrep.com/patent/US20160262255A1

## CPC

- G01R 31/2863: {Contacting devices, e.g. sockets, burn-in boards or mounting fixtures (in general G01R1/04)}
- G01R 1/0408: {Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets (G01R1/067 takes precedence; mass production testing systems G01R31/59; testing of connections G01R31/66; for testing printed circuit boards G01R31/2808)}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A test board unit may include a test board, a thermal tank and a heat-dissipating plate. The test board may be configured to provide a semiconductor chip with a test current. The thermal tank may be configured to dissipate heat generated in the semiconductor chip. The heat-dissipating plate may be coupled between the test board and the thermal tank and may be configured to transfer the heat from the semiconductor chip to the thermal tank.

## Claims

### Claim 1

A test board unit comprising:
a test board configured to provide a semiconductor chip with a test current;
a thermal tank configured to dissipate heat generated from the semiconductor chip; and
a heat-dissipating plate interposed between the test board and the thermal tank and configured to transfer the heat to the thermal tank.

### Claim 2 (depends on 1)

The test board unit of claim 1, wherein the thermal tank is in direct contact with the heat-dissipating plate.

### Claim 3 (depends on 1)

The test board unit of claim 1, further comprising an insulating layer formed on an outer surface of the thermal tank.

### Claim 4 (depends on 1)

The test board unit of claim 1, wherein the thermal tank has at least one heat-dissipating hole.

### Claim 5 (depends on 1)

The test board unit of claim 1, further comprising a heat-dissipating via arranged in the test board to electrically connect the semiconductor chip with the heat-dissipating plate.

### Claim 6 (depends on 5)

The test board unit of claim 5, wherein the heat-dissipating via include a thermal via having a copper layer formed on an inner surface of the thermal via.

### Claim 7 (depends on 1)

The test board unit of claim 1, wherein the test board comprises a test pattern configured to provide the semiconductor chip with the test current, and the heat-dissipating plate is electrically connected to the test pattern.

### Claim 8

A test board unit comprising:
a test board configured to provide a semiconductor chip with a test current;
a thermal tank configured to dissipate heat generated from the semiconductor chip; and
a heat-dissipating via arranged in the test board to electrically couple the semiconductor chip with the thermal tank.

### Claim 9 (depends on 8)

The test board unit of claim 8, wherein the thermal tank is in contact with the test board.

### Claim 10 (depends on 9)

The test board unit of claim 9, wherein substantially no gap exists between the thermal tank and the test board.

### Claim 11 (depends on 8)

The test board unit of claim 8, further comprising an insulating layer formed on an outer surface of the thermal tank.

### Claim 12 (depends on 8)

The test board unit of claim 8, wherein the thermal tank has at least one heat-dissipating hole.

### Claim 13 (depends on 8)

The test board unit of claim 8, wherein the test board comprises a test pattern configured to provide the semiconductor chip with the test current, and the heat-dissipating plate is electrically connected to the test pattern.

### Claim 14

An apparatus for testing a semiconductor chip, the apparatus comprising:
a test board configured to provide the semiconductor chip with a test current;
a socket arranged on the test board and configured to accept the semiconductor chip;
a thermal tank configured to dissipate heat generated from the semiconductor chip; and
a heat-dissipating plate coupled between the test board and the thermal tank and configured to transfer the heat to the thermal tank.

### Claim 15 (depends on 14)

The apparatus of claim 14, wherein the socket is arranged on a first surface of the test board, and the heat-dissipating plate is arranged on a second surface of the test board opposite to the first surface.

### Claim 16 (depends on 14)

The apparatus of claim 14, wherein the socket comprises electrode terminals electrically connected to the semiconductor chip, and the heat-dissipating plate is configured to surround the electrode terminals of the socket.

### Claim 17 (depends on 14)

The apparatus of claim 14, further comprising a heat-dissipating via arranged in the test board to electrically connect the semiconductor chip with the heat-dissipating plate.

### Claim 18

An apparatus for testing a semiconductor chip, the apparatus comprising:
a test board configured to provide the semiconductor chip with a test current;
a socket arranged on the test board and configured to accept the semiconductor chip;
a thermal tank configured to dissipate heat generated from the semiconductor chip; and
a heat-dissipating via arranged in the test board and configured to electrically couple the semiconductor chip with the thermal tank.

### Claim 19 (depends on 18)

The apparatus of claim 18, wherein the socket is arranged on a first surface of the test board, and the heat-dissipating plate is arranged on a second surface of the test board opposite to the first surface.

### Claim 20 (depends on 18)

The apparatus of claim 18, wherein the thermal tank includes at least one heat-dissipating fin located on a lower surface of the thermal tank.
