# US 2016/0259254 A1 · Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2016/0259254 A1 - Document ID: US20160259254A1 - Status: Published application - Kind: A1 - Application number: 15/146,105 - Filed: 2016-05-04 - Published: 2016-09-08 - Earliest claimed: 2011-12-29 - Assignees: Nikon Corporation - Applicants: Nikon Corporation - Inventors: Yuichi SHIBAZAKI - Web page: https://patentgrep.com/patent/US20160259254A1 ## CPC - G03F 7/70725: {control} - G03F 7/70133: {Measurement of illumination distribution, in pupil plane or field plane} - G03F 7/707: {Chucks, e.g. chucking or un-chucking operations or structural details} - G03F 7/7075: {Handling workpieces outside exposure position, e.g. SMIF box} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract An exposure apparatus exposes a substrate with illumination light via an optical system. A stage disposed below the optical system has a holder to hold the substrate. A carrier system disposed above the stage has a first support member that supports the substrate in a noncontact manner from a surface side of the substrate, which is irradiated with the illumination light. A second support member different from the first support member supports the substrate in a contact manner from a rear surface side. A drive system coupled to the first and the second support members moves at least the second support member so that relative movement between the first and the second support members and relative movement between the second support member and the holder are performed at least in a vertical direction. The second support member carries the substrate from the first support member to the holder. ## Claims ### Claim 1 An exposure apparatus that exposes a substrate with illumination light via an optical system, the apparatus comprising: a stage that is disposed below the optical system and has a holder to hold the substrate; a carrier system that is disposed above the stage and has a first support member, the first support member supporting the substrate in a noncontact manner from a surface side of the substrate, and the surface side being irradiated with the illumination light; a second support member different from the first support member, the second support member supporting the substrate in a contact manner from a rear surface side of the substrate; a drive system that is coupled to the first and the second support members, and moves at least the second support member so that relative movement between the first and the second support members and relative movement between the second support member and the holder are performed at least in a vertical direction; and a controller that controls the carrier system and the drive system so that the substrate is carried from the first support member to the holder via the second support member. ### Claim 2 (depends on 1) The exposure apparatus according to claim 1, wherein the second support member is provided at the stage, and is moved relative to the holder. ### Claim 3 (depends on 2) The exposure apparatus according to claim 2, wherein the drive system has a first drive section and a second drive section, the first drive section being provided at the carrier system and moving the first support member, and the second drive section being provided at the stage and moving the second support member. ### Claim 4 (depends on 3) The exposure apparatus according to claim 3, wherein the controller controls at least one of the carrier system and the drive system so that deformation of the substrate is controlled. ### Claim 5 (depends on 4) The exposure apparatus according to claim 4, wherein the controller controls at least one of repulsion and attraction of the first support member so that at least apart of the substrate is displaced in the vertical direction. ### Claim 6 (depends on 5) The exposure apparatus according to claim 5, wherein a force in the vertical direction is applied to the substrate while the substrate is mounted on the holder or supported by the first support member. ### Claim 7 (depends on 6) The exposure apparatus according to claim 6, wherein prior to holding of the substrate by the holder, displacement of the substrate is performed. ### Claim 8 (depends on 5) The exposure apparatus according to claim 5, wherein the controller adjusts a positional relationship between a substrate supported by the first support member and the second support member so that at least a part of the substrate is displaced in the vertical direction. ### Claim 9 (depends on 3) The exposure apparatus according to claim 3, wherein the carrier system carries a substrate supported by the first support member, to above the stage placed at a loading position that is away from the optical system. ### Claim 10 (depends on 9) The exposure apparatus according to claim 9, further comprising: a frame that supports the optical system; and a detection system that is provided at the frame, away from the optical system, and detects positional information of the substrate, wherein the stage is moved to an unloading position between the optical system and the detection system so that unloading of the substrate is performed, the unloading position being different from the loading position. ### Claim 11 (depends on 10) The exposure apparatus according to claim 10, further comprising: another frame different from the frame, at least a part of the carrier system being provided at the another frame. ### Claim 12 (depends on 9) The exposure apparatus according to claim 9, wherein the carrier system has at least one of a pre-alignment device and a temperature control device for the substrate, the pre-alignment device and the temperature control device each having at least a part provided at the first support member, and at least one of deformation control, pre-alignment and temperature control of the substrate is performed by the first support member. ### Claim 13 (depends on 9) The exposure apparatus according to claim 9, wherein the first and the second support members are moved downward by the drive system and support of the substrate by the first and the second support members is released so that the substrate is mounted on the holder. ### Claim 14 (depends on 9) The exposure apparatus according to claim 9, further comprising: a detection system that is disposed in a measurement station and detects positional information of the substrate, the measurement station being different from an exposure station in which the optical system is disposed, wherein the loading position is set on one side in a first direction within a predetermined plane with respect to the optical system, the predetermined plane being orthogonal to an optical axis of the optical system, and in an exposure operation of the substrate, the controller controls movement of the stage so that the stage is moved from one side to an other side in the first direction in order to expose a first area of the substrate on one side in a second direction and also the stage is moved from the other side to the one side in the first direction to expose a second area of the substrate on an other side in the second direction, the second direction being orthogonal to the first direction within the predetermined plane. ### Claim 15 (depends on 1) A device manufacturing method, comprising: exposing a substrate using the exposure apparatus according to claim 1; and developing the substrate that has been exposed. ### Claim 16 An exposure method of exposing a substrate with illumination light via an optical system, the method comprising: carrying the substrate to above a stage that has a holder to hold the substrate, with a carrier system that has a first support member, the first support member supporting the substrate in a noncontact manner from a surface side of the substrate, and the surface side being irradiated with the illumination light; performing relative movement between the first support member and a second support member and relative movement between the second support member and the holder at least in a vertical direction so that the substrate is carried from the first support member to the holder via the second support member, the second support member being different from the first support member and supporting the substrate in a contact manner from a rear surface side of the substrate. ### Claim 17 (depends on 16) The exposure method according to claim 16, wherein the substrate is carried to above the stage placed at a loading position, while being supported by the first support member, the loading position being away from the optical system. ### Claim 18 (depends on 17) The exposure method according to claim 17, wherein positional information of the substrate is detected by a detection system disposed away from the optical system, and the substrate is unloaded from the stage at an unloading position between the optical system and the detection system, the unloading position being different from the loading position. ### Claim 19 (depends on 17) The exposure method according to claim 17, wherein at least one of deformation control, pre-alignment and temperature control of the substrate is performed by the first support member. ### Claim 20 (depends on 16) A device manufacturing method, comprising: exposing a substrate using the exposure method according to claim 16; and developing the substrate that has been exposed. ### Claim 21 A method of making an exposure apparatus that exposes a substrate with illumination light via an optical system, the method comprising: providing a stage that is disposed below the optical system and has a holder to hold the substrate; providing a carrier system that is disposed above the stage and has a first support member, the first support member supporting the substrate in a noncontact manner from a surface side of the substrate, and the surface side being irradiated with the illumination light; providing a second support member different from the first support member, the second support member supporting the substrate in a contact manner from a rear surface side of the substrate; providing a drive system that is coupled to the first and the second support members, and moves at least the second support member so that relative movement between the first and the second support members and relative movement between the second support member and the holder are performed at least in a vertical direction; and providing a controller that controls the carrier system and the drive system so that the substrate is carried from the first support member to the holder via the second support member.