# US 2016/0259249 A1 · Support apparatus for an optical device, optical device and lithography system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2016/0259249 A1 - Document ID: US20160259249A1 - Status: Published application - Kind: A1 - Application number: 15/156,602 - Filed: 2016-05-17 - Published: 2016-09-08 - Earliest claimed: 2013-11-27 - Assignees: Carl Zeiss SMT GmbH - Applicants: Carl Zeiss SMT GmbH - Inventors: Henner Baitinger; Markus Hauf - Web page: https://patentgrep.com/patent/US20160259249A1 ## CPC - G03F 7/702: {Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems} - G02B 7/181: {with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation} - G02B 26/0816: {by means of one or more reflecting elements} - G03F 7/70075: {Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection} - G03F 7/70116: {Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets} - G03F 7/70141: {Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system} - G03F 7/70825: {Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707)} - G03F 7/70891: {Temperature} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract A support device for an optical apparatus is disclosed. The support device includes first and second support elements. The support device also includes first and second flexure bearings. The first flexure bearing and the second flexure bearing each connect the first support element and the second support element to one another in a thermally conductive manner and hold the first support element in a manner movable in at least one first direction relative to the second support element. Spring forces generated by the first flexure bearing and the second flexure bearing partly or completely cancel one another out in the case of a movement of the first support element relative to the second support element in the first direction. ## Claims ### Claim 1 A support device configured to support an optical element, the support device comprising: a first support element; a second support element; a first flexure bearing; and a second flexure bearing, wherein: the first flexure bearing connects the first and second support elements to each other in a thermally conductive manner; the second flexure bearing connects the first and second support elements to each other in a thermally conductive manner; the first and second flexure bearings hold the first and second support elements so that the first support element is moveable relative to the second support element in a first direction; and the support device is configured so that, when the first support element moves relative to the second support element in the first direction, a spring force generated by the first flexure bearing and a spring force generated by the second flexure bearing at least partially cancel each other out. ### Claim 2 (depends on 1) The support device of claim 1, wherein the first flexure bearing has a positive spring constant, and the second flexure bearing has a negative spring constant. ### Claim 3 (depends on 2) The support device of claim 2, wherein: the first flexure bearing comprises spring elements extending in a second direction which is transverse to the first direction; and the second flexure bearing comprises spring elements extending in the second direction. ### Claim 4 (depends on 3) The support device of claim 3, wherein at least one of the following holds: the spring elements the first flexure are pretensioned in the second direction; and the spring elements of the second flexure bearing are pretensioned in the second direction. ### Claim 5 (depends on 3) The support device of claim 3, wherein at least one of the following holds: in a non-deflected state of the first support element, the spring elements of the first flexure bearing extend in a straight line in the second direction; and the spring elements of the second flexure bearing have a kink pointing in the first direction or in a direction counter to the first direction. ### Claim 6 (depends on 1) The support device of claim 1, wherein: the first flexure bearing comprises tensioned spring elements; and in a non-deflected state of the first support element, the second flexure bearing comprises compressed spring elements. ### Claim 7 (depends on 1) The support device of claim 1, further comprising a third flexure bearing, wherein: the third flexure bearing is between the first and second flexure bearings; the third flexure bearing connects the first and second support elements to each other in a thermally conductive manner; and the first, second and second flexure bearing hold the first and second support elements so that the first and second support elements are moveable relative to each other in a first direction. ### Claim 8 (depends on 1) The support device of claim 1, wherein the support device is configured so that, when the first support element moves relative to the second support element in the first direction: the first flexure bearing generates a constant force during at least part of the movement of the first support element relative to the second support element in the first direction; and the second flexure bearing generates a constant force during at least part of the movement of the first support element relative to the second support element in the first direction. ### Claim 9 (depends on 8) The support device of claim 8, wherein: a portion of the first support element is arranged between first and second portions of the second support element; the first flexure bearing supports a first side of the portion of the first support element on the first portion of the second support element; the second flexure bearing supports a second side of the portion of the first support element on the second portion of the second support element; and the first side of the portion of the first support element is opposite the second side of the first support element. ### Claim 10 (depends on 8) The support device of claim 8, wherein at least one of the following holds: the first flexure bearing comprises spring elements extending in the first direction; and the second flexure bearing comprises spring elements extending in the first direction. ### Claim 11 (depends on 8) The support device of claim 8, wherein at least one of the following holds: the first flexure bearing comprises at least two spring elements arranged symmetrically with respect to each other; and the second flexure bearing comprises at least two spring elements arranged symmetrically with respect to each other. ### Claim 12 (depends on 10) The support device of claim 10, wherein at least one of the following holds: the spring elements of the first flexure bearing comprise a kink pointing in: a) a second direction which is transverse to the first direction; or b) a direction counter to the second direction; and the spring elements of the first flexure bearing comprise a kink pointing in: a) the second direction; or b) the direction counter to the second direction. ### Claim 13 (depends on 1) The support device of claim 1, wherein the support device is configured so that movement of the first support element relative to the second support element is a linear movement. ### Claim 14 (depends on 1) The support device of claim 1, wherein at least one of the following holds: the first flexure bearing comprises spring elements having a ratio of thickness to width of at least 1:10 and a ratio of thickness to length of at least 1:10; and the second flexure bearing comprises spring elements having a ratio of thickness to width of at least 1:10 and a ratio of thickness to length of at least 1:10. ### Claim 15 (depends on 1) The support device of claim 1, wherein at least one of the following holds: the first flexure bearing comprises spring elements comprising at least one shape selected from the group consisting of rod-shaped, wire-shaped, and film-shaped embodiment; and the second flexure bearing comprises spring elements comprising at least one shape selected from the group consisting of rod-shaped, wire-shaped, and film-shaped embodiment. ### Claim 16 (depends on 1) The support device of claim 1, wherein at least one of the following holds: the first flexure bearing comprises spring elements that are spaced from each other; and the second flexure bearing comprises spring elements that are spaced from each other. ### Claim 17 (depends on 1) The support device of claim 1, wherein at least one of the following holds: the first flexure bearing comprises spring elements that are parallel to each other; and the second flexure bearing comprises spring elements that are parallel to each other. ### Claim 18 (depends on 1) The support device of claim 1, wherein at least one of the following holds: the first flexure bearing comprises a metal; and the second flexure bearing comprises a metal. ### Claim 19 An optical apparatus, comprising: an optical element; and a support device configured to hold the optical element, the support device comprising: a first support element; a second support element; a first flexure bearing; and a second flexure bearing, wherein: the first flexure bearing connects the first and second support elements to each other in a thermally conductive manner; the second flexure bearing connects the first and second support elements to each other in a thermally conductive manner; the first and second flexure bearings hold the first and second support elements so that the first support element is moveable relative to the second support element in a first direction; and the support device is configured so that, when the first support element moves relative to the second support element in the first direction, a spring force generated by the first flexure bearing and a spring force generated by the second flexure bearing at least partially cancel each other out. ### Claim 20 (depends on 19) The optical apparatus of claim 19, wherein the optical element comprises a mirror. ### Claim 21 An installation, comprising: an illumination system; and a projection lens, wherein the installation further comprises: an optical element; and a support device configured to hold the optical element, the support device comprising: a first support element; a second support element; a first flexure bearing; and a second flexure bearing, and wherein: the first flexure bearing connects the first and second support elements to each other in a thermally conductive manner; the second flexure bearing connects the first and second support elements to each other in a thermally conductive manner; the first and second flexure bearings hold the first and second support elements so that the first support element is moveable relative to the second support element in a first direction; the support device is configured so that, when the first support element moves relative to the second support element in the first direction, a spring force generated by the first flexure bearing and a spring force generated by the second flexure bearing at least partially cancel each other out; and the installation is a lithography installation. ### Claim 22 (depends on 21) The installation of claim 21, wherein the installation is an EUV lithography installation. ### Claim 23 (depends on 21) The installation of claim 21, wherein the optical element comprises a mirror. ### Claim 24 (depends on 21) The installation of claim 21, wherein the projection lens comprises the optical element and the support device.