# US 2016/0259239 A1 · Pellicle frame and process for producing same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2016/0259239 A1 - Document ID: US20160259239A1 - Status: Published application - Kind: A1 - Application number: 15/026,901 - Filed: 2013-10-23 - Published: 2016-09-08 - Earliest claimed: 2013-10-23 - Assignees: Nippon Light Metal Company, Ltd. - Applicants: Nippon Light Metal Company, Ltd. - Inventors: Takayuki YAMAGUCHI; Yoshihiro TAGUCHI - Web page: https://patentgrep.com/patent/US20160259239A1 ## CPC - G03F 1/64: characterised by the frames, e.g. structure or material, including bonding means therefor - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract The present invention provides a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collected light, and a method of manufacturing the pellicle frame. Specifically, provided are a pellicle frame, including: an aluminum frame material formed of aluminum or an aluminum alloy; and an anodic oxide film on a surface of the aluminum frame material, in which the anodic oxide film includes a film formed by using an alkaline anodic oxidation solution and a film formed by using an acid anodic oxidation solution, and a method of manufacturing the pellicle frame. ## Claims ### Claim 1 A pellicle frame, comprising: an aluminum frame material formed of aluminum or an aluminum alloy; and an anodic oxide film on a surface of the aluminum frame material, wherein the anodic oxide film comprises a film formed by using an alkaline anodic oxidation solution and a film formed by using an acid anodic oxidation solution. ### Claim 2 (depends on 1) A pellicle frame according to claim 1, wherein the anodic oxide film is substantially free of an intermetallic compound having a maximum length of 5 μm or more. ### Claim 3 (depends on 1) A pellicle frame according to claim 1, wherein the alkaline anodic oxidation solution comprises an inorganic alkaline solution containing any one or more kinds of inorganic alkaline components selected from the group consisting of sodium hydroxide, potassium hydroxide, lithium hydroxide, calcium hydroxide, strontium hydroxide, rubidium hydroxide, sodium carbonate, and sodium hydrogen carbonate. ### Claim 4 (depends on 1) A pellicle frame according to claim 1, wherein the alkaline anodic oxidation solution comprises an alkaline mixed solution containing any one or more kinds of salts of organic acids selected from the group consisting of tartaric acid, citric acid, oxalic acid, and salicylic acid and any one or more kinds of inorganic alkaline components selected from the group consisting of sodium hydroxide, potassium hydroxide, lithium hydroxide, calcium hydroxide, strontium hydroxide, rubidium hydroxide, sodium carbonate, and sodium hydrogen carbonate. ### Claim 5 (depends on 1) A pellicle frame according to claim 1, wherein the acid anodic oxidation solution comprises an acid solution containing any one or more kinds selected from the group consisting of maleic acid, phosphoric acid, oxalic acid, and chromic acid. ### Claim 6 (depends on 1) A pellicle frame according to claim 1, wherein the aluminum or aluminum alloy comprises an Al—Zn—Mg-based aluminum alloy. ### Claim 7 (depends on 1) A pellicle frame according to claim 1, wherein the anodic oxide film is blackened through dyeing treatment with a black dye or electrolytic deposition treatment so as to have a lightness index L* value of 40 or less. ### Claim 8 (depends on 1) A pellicle frame according to claim 1, wherein the pellicle frame has concentrations of ions to be eluted in 100 ml of pure water per 100 cm2 of a surface area of the pellicle frame in an ion elution test for measuring concentrations of ions eluted after immersion in pure water at 80° C. for 4 hours of: 0.2 ppm or less for an acetate ion; 0.06 ppm or less for a formate ion; 0.01 ppm or less for an oxalate ion; 0.01 ppm or less for a sulfate ion; 0.02 ppm or less for a nitrate ion; 0.02 ppm or less for a nitrite ion; 0.02 ppm or less for a chlorine ion; and 0.01 ppm or less for a phosphate ion. ### Claim 9 A method of manufacturing a pellicle frame comprising: an aluminum frame material formed of aluminum or an aluminum alloy; and an anodic oxide film on a surface of the aluminum frame material, the method comprising the steps of, when forming the anodic oxide film: performing anodic oxidation treatment using an alkaline anodic oxidation solution; and performing anodic oxidation treatment using an acid anodic oxidation solution. ### Claim 10 (depends on 9) A method of manufacturing a pellicle frame according to claim 9, wherein the anodic oxide film is substantially free of an intermetallic compound having a maximum length of 5 μm or more. ### Claim 11 (depends on 9) A method of manufacturing a pellicle frame according to claim 9, wherein the alkaline anodic oxidation solution comprises an inorganic alkaline solution containing any one or more kinds of inorganic alkaline components selected from the group consisting of sodium hydroxide, potassium hydroxide, lithium hydroxide, calcium hydroxide, strontium hydroxide, rubidium hydroxide, sodium carbonate, and sodium hydrogen carbonate. ### Claim 12 (depends on 9) A method of manufacturing a pellicle frame according to claim 9, wherein the alkaline anodic oxidation solution comprises an alkaline mixed solution containing any one or more kinds of salts of organic acids selected from the group consisting of tartaric acid, citric acid, oxalic acid, and salicylic acid and any one or more kinds of inorganic alkaline components selected from the group consisting of sodium hydroxide, potassium hydroxide, lithium hydroxide, calcium hydroxide, strontium hydroxide, rubidium hydroxide, sodium carbonate, and sodium hydrogen carbonate. ### Claim 13 (depends on 9) A method of manufacturing a pellicle frame according to claim 9, wherein the acid anodic oxidation solution comprises an acid solution containing any one or more kinds selected from the group consisting of maleic acid, phosphoric acid, oxalic acid, and chromic acid. ### Claim 14 (depends on 9) A method of manufacturing a pellicle frame according to claim 9, wherein the aluminum or aluminum alloy comprises an Al—Zn—Mg-based aluminum alloy. ### Claim 15 (depends on 9) A method of manufacturing a pellicle frame according to claim 9, the method further comprising blackening the anodic oxide film through dyeing treatment with a black dye or electrolytic deposition treatment so as to have a lightness index L* value of 40 or less. ### Claim 16 (depends on 9) A method of manufacturing a pellicle frame according to claim 9, wherein the pellicle frame has concentrations of ions to be eluted in 100 ml of pure water per 100 cm2 of a surface area of the pellicle frame in an ion elution test for measuring concentrations of ions eluted after immersion in pure water at 80° C. for 4 hours of: 0.2 ppm or less for an acetate ion; 0.06 ppm or less for a formate ion; 0.01 ppm or less for an oxalate ion; 0.01 ppm or less for a sulfate ion; 0.02 ppm or less for a nitrate ion; 0.02 ppm or less for a nitrite ion; 0.02 ppm or less for a chlorine ion; and 0.01 ppm or less for a phosphate ion.