# US 2016/0259157 A1 · Optical image scanning component and microscope device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2016/0259157 A1 - Document ID: US20160259157A1 - Status: Published application - Kind: A1 - Application number: 14/944,842 - Filed: 2015-11-18 - Published: 2016-09-08 - Earliest claimed: 2015-03-03 - Assignees: Southport Corporation - Applicants: Southport Corporation - Inventors: Yu-Yang LEE; Feng-Chieh LI - Web page: https://patentgrep.com/patent/US20160259157A1 ## CPC - G02B 21/0048: {scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors} - G02B 26/101: {with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129)} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract An optical image scanning component is suitable to receive a light provided by a light source of a microscope device and comprises a first scanning unit and a second scanning unit. The first scanning unit comprises a first scanning mirror rotated along a first direction as axis at a first resonance frequency. The second scanning unit comprises a second scanning mirror rotated along a second direction as axis at a second resonance frequency which is different from the first resonance frequency. The light is emitted to the first scanning mirror and reflected to the second scanning mirror, and the light is reflected by the second scanning mirror to be transmitted to an objective lens module of the microscope device. ## Claims ### Claim 1 An optical image scanning component suitable to receive a light provided by a light source of a microscope device, comprising: a first scanning unit comprising a first scanning mirror, which is rotated along a first direction as axis at a first resonance frequency; a second scanning unit comprising a second scanning mirror, which is rotated along a second direction as axis at a second resonance frequency which is different from the first resonance frequency, wherein the light is emitted to the first scanning mirror and reflected to the second scanning mirror, and the light is reflected by the second scanning mirror to be transmitted to an objective lens module of the microscope device. ### Claim 2 (depends on 1) The optical image scanning component as recited in claim 1, wherein the first resonance frequency is less than or equal to 32 KHz. ### Claim 3 (depends on 1) The optical image scanning component as recited in claim 1, wherein the second resonance frequency is 0˜1 KHz. ### Claim 4 (depends on 1) The optical image scanning component as recited in claim 1, further comprising: a third scanning unit comprising a third scanning mirror, which is rotated along the first direction as axis at a third resonance frequency, and the third scanning unit disposed between the first scanning unit and the second scanning unit, wherein the light is transmitted to the third scanning mirror after being reflected by the first scanning mirror, and is reflected to the second scanning mirror by the third scanning mirror. ### Claim 5 (depends on 4) The optical image scanning component as recited in claim 4, wherein the third resonance frequency is substantially the same as the second resonance frequency. ### Claim 6 (depends on 1) The optical image scanning component as recited in claim 1, wherein the first direction is substantially perpendicular to the second direction. ### Claim 7 (depends on 1) The optical image scanning component as recited in claim 1, further comprising: a control unit electrically connected with the first scanning unit and the second scanning unit and outputting a first control signal and a second control signal to control the first scanning mirror and the second scanning mirror to rotate. ### Claim 8 (depends on 7) The optical image scanning component as recited in claim 7, wherein the second scanning unit further comprises: an actuator, wherein the second scanning mirror is disposed on the actuator, and the actuator is electrically connected with the control unit and drives the second scanning mirror to rotate along the second direction as axis according to the second control signal. ### Claim 9 (depends on 1) The optical image scanning component as recited in claim 1, wherein the first scanning unit is a MEMS (Microelectromechanical Systems) element, a rotational poly-scanner or a resonant scanner. ### Claim 10 A microscope device, comprising: a light source providing a light; an optical module comprising a plurality of optical lenses and having a light input side; an optical image scanning component comprising a first scanning unit and a second scanning unit, wherein the first scanning unit comprises a first scanning mirror rotated along a first direction as axis at a first resonance frequency, the second scanning unit comprises a second scanning mirror rotated along a second direction as axis at a second resonance frequency which is different from the first resonance frequency; and an objective lens module, wherein the light enters into the optical module through the light input side, when passing through the optical module, the light is emitted to the first scanning mirror and reflected to the second scanning mirror by the first scanning mirror, and the light is reflected to the objective lens module by the second scanning mirror and is emitted to an sample after passing through the objective lens module. ### Claim 11 (depends on 10) The microscope device as recited in claim 10, wherein the first resonance frequency is less than or equal to 32 KHz. ### Claim 12 (depends on 10) The microscope device as recited in claim 10, wherein the second resonance frequency is 0˜1 KHz. ### Claim 13 (depends on 10) The microscope device as recited in claim 10, wherein the optical image scanning component further comprises: a third scanning unit comprising a third scanning mirror, which is rotated along the first direction as axis at a third resonance frequency, and the third scanning unit disposed between the first scanning mirror and the second scanning mirror, wherein the light is transmitted to the third scanning mirror after being reflected by the first scanning mirror, and is reflected to the second scanning mirror by the third scanning mirror. ### Claim 14 (depends on 10) The microscope device as recited in claim 10, wherein the third resonance frequency is substantially the same as the second resonance frequency. ### Claim 15 (depends on 10) The microscope device as recited in claim 10, wherein the first direction is substantially perpendicular to the second direction. ### Claim 16 (depends on 10) The microscope device as recited in claim 10, wherein the optical image scanning component further comprises: a control unit electrically connected with the first scanning unit and the second scanning unit and outputting a first control signal and a second control signal to control the first scanning mirror and the second scanning mirror to rotate. ### Claim 17 (depends on 16) The microscope device as recited in claim 16, wherein the second scanning unit further comprises: an actuator, wherein the second scanning mirror is disposed on the actuator, and the actuator is electrically connected with the control unit and drives the second scanning mirror to rotate along the second direction as axis according to the second control signal. ### Claim 18 (depends on 10) The microscope device as recited in claim 10, wherein the first scanning unit is a MEMS (Microelectromechanical Systems) element, a rotational poly-scanner or a resonant scanner.