# US 2016/0257571 A1 · Catalyst for producing higher silane and process for producing higher silane

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- Number: US 2016/0257571 A1
- Document ID: US20160257571A1
- Status: Published application
- Kind: A1
- Application number: 15/030,802
- Filed: 2014-10-16
- Published: 2016-09-08
- Earliest claimed: 2013-10-21
- Assignees: Mitsui Chemicals, Inc.
- Applicants: Mitsui Chemicals, Inc.
- Inventors: Tatsumi MATSUSHITA; Yoshinori NOUJI; Akira MATSUURA
- Web page: https://patentgrep.com/patent/US20160257571A1

## CPC

- C01B 33/04: Hydrides of silicon
- B01J 29/035: {Microporous crystalline materials not having base exchange properties, such as} silica polymorphs, e.g. silicalites
- B01J 29/061: {containing metallic elements added to the zeolite}
- B01J 29/18: of the mordenite type
- B01J 29/40: of the pentasil type, e.g. types ZSM-5, ZSM-8 or ZSM-11, as exemplified by patent documents US3702886, GB1334243 and US3709979, respectively
- B01J 29/7007: {Zeolite Beta}
- B01J 35/643: {less than 2 nm}
- B01J 38/10: using elemental hydrogen
- B01J 29/90: Regeneration or reactivation
- Y02P 20/584: Recycling of catalysts
- C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C}
- B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS

## Abstract

Provided are a catalyst for producing a higher silane with high yield at low cost by performing a reaction at relatively low temperature while inhibiting decomposition into solid silicon; and a process using the catalyst for producing a higher silane. The catalyst for producing a higher silane includes a porous oxide and is used to convert a lower silane to a higher silane wherein the porous oxide has at least regularly arranged pores and is primarily composed of silicon oxide, wherein a content of alkali metals and alkali earth metals in the porous oxide is not less than 0.00 wt % and not more than 2.00 wt %.

## Claims

### Claim 1

A catalyst for producing a higher silane which comprises a porous oxide and which by being contacted with a lower silane converts the lower silane to the higher silane having more silicon than the lower silane, wherein the porous oxide has at least regularly arranged pores and is primarily composed of silicon oxide, wherein a content of alkali metals and alkali earth metals in the porous oxide is not less than 0.00 wt % and not more than 2.00 wt %.

### Claim 2 (depends on 1)

The catalyst for producing a higher silane according to claim 1, wherein the porous oxide has a pore diameter of not less than 0.4 nm and not more than 0.6 nm.

### Claim 3 (depends on 1)

The catalyst for producing a higher silane according to claim 1, wherein the pore of the porous oxide is formed from an 8 to 12-membered oxygen ring.

### Claim 4 (depends on 1)

The catalyst for producing a higher silane according to claim 1, wherein the porous oxide has a crystalline zeolite structure formed from aluminosilicate or metallosilicate.

### Claim 5 (depends on 4)

The catalyst for producing a higher silane according to claim 4, wherein the crystalline zeolite structure is at least any one of BEA-type, FER-type, LTA-type, MFI-type, MOR-type and MWW-type.

### Claim 6 (depends on 4)

The catalyst for producing a higher silane according to claim 4, wherein alkali metal ions or alkali earth metal ions compensating for a negative charge of the aluminosilicate or metallosilicate skeleton in the porous oxide are substituted with hydrogen ions.

### Claim 7 (depends on 4)

The catalyst for producing a higher silane according to claim 4, wherein the porous oxide is aluminosilicate, and a SiO2/Al2O3 molar ratio in the porous oxide is not less than 10 and not more than 3,000.

### Claim 8 (depends on 7)

The catalyst for producing a higher silane according to claim 7, wherein the SiO2/Al2O3 molar ratio is not less than 20 and not more than 2,000.

### Claim 9 (depends on 1)

A process for producing a higher silane comprising bringing a lower silane into contact with the catalyst for producing a higher silane according to claim 1 thereby converting the lower silane to the higher silane having more silicon than the lower silane.

### Claim 10 (depends on 9)

The process for producing a higher silane according to claim 9, wherein the lower silane is brought into contact with the catalyst for producing the higher silane at a temperature lower than a temperature at which the higher silane starts to be substantially produced through thermal decomposition of the lower silane under conditions where no catalysts are present.

### Claim 11 (depends on 9)

The process for producing a higher silane according to claim 9, wherein the temperature at which the lower silane is brought into contact with the catalyst for producing a higher silane is not lower than 100° C. and not higher than 400° C.

### Claim 12 (depends on 11)

The process for producing a higher silane according to claim 11, wherein the temperature is not lower than 120° C. and not higher than 350° C.

### Claim 13 (depends on 11)

The process for producing a higher silane according to claim 11, wherein the temperature is not lower than 140° C. and not higher than 300° C.

### Claim 14 (depends on 9)

The process for producing a higher silane according to claim 9, wherein the lower silane is supplied by a raw material gas including a lower silane, and a concentration of the lower silane in the raw material gas is not less than 50 vol % and not more than 100 vol %.

### Claim 15 (depends on 9)

The process for producing a higher silane according to claim 9, wherein the lower silane is monosilane, and the higher silane is disilane and trisilane.

### Claim 16 (depends on 9)

The process for producing a higher silane according to claim 9, wherein the lower silane is monosilane, and the higher silane is disilane.

### Claim 17 (depends on 9)

The process for producing a higher silane according to claim 9, wherein the lower silane is disilane, and the higher silane is trisilane.

### Claim 18 (depends on 9)

The process for producing a higher silane according to claim 9, comprising a step of subjecting the catalyst for producing a higher silane to an activation treatment using a hydrogen-containing gas.

### Claim 19 (depends on 18)

The process for producing a higher silane catalyst according to claim 18, wherein at the step of subjecting the catalyst for producing a higher silane to an activation treatment using a hydrogen-containing gas, the treatment temperature is not less than 20° C.