# US 2016/0257557 A1 · Mirco-electro-mechanical system device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2016/0257557 A1 - Document ID: US20160257557A1 - Status: Published application - Kind: A1 - Application number: 14/728,153 - Filed: 2015-06-02 - Published: 2016-09-08 - Earliest claimed: 2015-03-05 - Assignees: Richtek Technology Corporation - Inventors: Chia-Yu Wu; Chiung-Cheng Lo - Web page: https://patentgrep.com/patent/US20160257557A1 ## CPC - B81B 3/0051: {For defining the movement, i.e. structures that guide or limit the movement of an element (mechanical arrangements for preventing or damping vibration or shock H01H3/60)} - B81B 3/0072: {For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers} - G01P 15/125: by capacitive pick-up - G01P 15/18: in two or more dimensions - B81B 3/0027: {Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation} - B81B 2201/0235: Accelerometers - B81B 2203/04: Electrodes - G01P 2015/0814: {for translational movement of the mass, e.g. shuttle type} - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) ## Abstract The invention provides a micro-electro-mechanical system device including: a substrate; a proof mass, including an outer frame which inwardly defines an internal space, and at least one inner extension portion which is directly connected to the outer frame and inwardly extends from the outer frame; at least one compliant structure, located in the internal space, and directly connected to the corresponding inner extension portion; an anchor, located in the internal space and directly connected to the at least one compliant structure, the anchor being connected to the substrate; movable electrodes, located in the internal space and connected to the proof mass; and fixed electrodes, respectively located in correspondence to the movable electrodes, and being connected to the substrate through fixing portions. ## Claims ### Claim 1 A micro-electro-mechanical system (MEMS) device, comprising: a substrate; a proof mass, including an outer frame and at least one inner extension portion, the outer frame inwardly defining an internal space, the inner extension portion being directly connected to the outer frame and inwardly extending from the outer frame; at least one compliant structure, located in the internal space, the at least one compliant structure being directly connected to the corresponding inner extension portion; an anchor, located in the internal space and directly connected to the at least one compliant structure which assists a motion of the proof mass relative to the anchor, the anchor being connected to the substrate; a plurality of movable electrodes, located in the internal space and connected to the proof mass; and a plurality of fixed electrodes, respectively located in correspondence to the movable electrodes, and connected to the substrate through a plurality of fixing portions. ### Claim 2 (depends on 1) The MEMS device of claim 1, wherein the anchor is located at a geometric center or a mass center of the proof mass. ### Claim 3 (depends on 1) The MEMS device of claim 1, wherein the anchor is located in a distance to a mass center of the proof mass. ### Claim 4 (depends on 1) The MEMS device of claim 1, wherein the movable electrodes and the fixed electrodes includes: at least one movable electrode and at least one fixed electrode located along a first direction to sense a movement in the first direction, and at least another movable electrode and at least another fixed electrode located along a second direction to sense a movement in the second direction, wherein the first direction and the second direction are not parallel to each other. ### Claim 5 (depends on 1) The MEMS device of claim 1, wherein the movable electrodes and the fixed electrodes form one or more pairs of differential capacitors. ### Claim 6 (depends on 1) The MEMS device of claim 1, wherein the movable electrodes are connected to the at least one inner extension portion, or the outer frame; or the movable electrodes are connected to and between the at least one inner extension portion and the outer frame. ### Claim 7 (depends on 1) The MEMS device of claim 1, wherein the movable electrodes are located at two sides of the at least one inner extension portions, and the fixed electrodes are located at two sides of the at least one inner extension portions in correspondence to the movable electrodes. ### Claim 8 (depends on 1) The MEMS device of claim 1, further comprises: a plurality of middle movable electrodes and a plurality of middle fixed electrodes, the middle movable electrodes being connected to the proof mass, wherein the middle movable electrodes are located at two sides of the anchor, and the middle fixed electrodes are correspondingly located at two sides of the anchor in correspondence to the middle movable electrodes. ### Claim 9 (depends on 1) The MEMS device of claim 1, wherein a number of the at least one compliant structure is an even number, and the compliant structures respectively connect a corresponding even number of inner extension portions to the anchor. ### Claim 10 (depends on 9) The MEMS device of claim 9, wherein the even number of compliant structures are two compliant structures or four compliant structures.