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US 2016/0255729 A1Published application
Polymers containing benzimidazole moieties as levelers
AssigneesRohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
InventorsLingli Duan, Yang Li, Tong Sun, Shaoguang Feng, Chen Chen, Zuhra Niazimbetova, Maria Rzeznik
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Abstract
Polymers of reaction products of dihalogens and compounds containing benzimidazole moieties are included in metal electroplating compositions to provide level metal deposits on substrates.
Claims8
A polymer comprising a reaction product comprising one or more dihalogens and one or more compounds having formula:
- where R1, R2 and R3 of rings A and B may be the same or different and are hydrogen, thiol, linear or branched thio(C1-C12)alkyl, hydroxyl, linear or branched hydroxy(C1-C12)alkyl, amine, linear or branched alkyl(C1-C12)amine, linear or branched (C1-C12)alkyl, alkoxy, linear or branched alkoxy(C1-C12)alkyl or substituted or unsubstituted aryl, with the proviso that at least one of the compounds of formula (I) which reacts with the one or more dihalogens to form the reaction product, R2 and R3 of ring A or B are taken together with their carbon atoms to form a fused substituted or unsubstituted six membered aromatic ring;
- and R is (C1-C12)alkyl, an ether moiety, polyether moiety, carbonyl, >C═S, >C═NH, substituted or unsubstituted aryl or substituted or unsubstituted cycloalkyl.
A metal electroplating composition comprises:
- one or more sources of metal ions, an electrolyte, and one or more polymers, the polymers comprise a reaction product of one or more dihalogens and one or more compounds having formula:
- where R1, R2 and R3 of rings A and B may be the same or different and are hydrogen, thiol, linear or branched thio(C1-C12)alkyl, hydroxyl, linear or branched hydroxy(C1-C12)alkyl, amine, linear or branched alkyl(C1-C12)amine, linear or branched (C1-C12)alkyl, alkoxy, linear or branched alkoxy(C1-C12)alkyl or substituted or unsubstituted aryl, with the proviso that at least one of the compounds of formula (I) which reacts with the one or more dihalogens to form the reaction product, R2 and R3 of ring A or B are taken together with their carbon atoms to form a fused substituted or unsubstituted six membered aromatic ring;
- and R is (C1-C12)alkyl, an ether moiety, polyether moiety, carbonyl, >C═S, >C═NH, substituted or unsubstituted aryl or substituted or unsubstituted cycloalkyl.
A method comprising:
- a) contacting a substrate to be plated with a metal electroplating composition comprising:
- one or more sources of metal ions, an electrolyte, and one or more polymers, the one or more polymers comprise a reaction product of one or more dihalogens and one or more compounds having formula:
- where R1, R2 and R3 of rings A and B may be the same or different and are hydrogen, thiol, linear or branched thio(C1-C12)alkyl, hydroxyl, linear or branched hydroxy(C1-C12)alkyl, amine, linear or branched alkyl(C1-C12)amine, linear or branched (C1-C12)alkyl, alkoxy, linear or branched alkoxy(C1-C12)alkyl or substituted or unsubstituted aryl, with the proviso that at least one of the compounds of formula (I) which reacts with the one or more dihalogens to form the reaction product, R2 and R3 of ring A or B are taken together with their carbon atoms to form a fused substituted or unsubstituted six membered aromatic ring;
- and R is (C1-C12)alkyl, an ether moiety, polyether moiety, carbonyl, >C═S, >C═NH, substituted or unsubstituted aryl or substituted or unsubstituted cycloalkyl;
- b) applying a current;
- and
- c) depositing a metal on the substrate.
4 more elements
Dependencies are inferred from the claim text.