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US 2016/0254648 A1Published application
Gap Distributed Bragg Reflectors
AssigneePalo Alto Research Center Incorporated
InventorsThomas Wunderer, Christopher L. Chua, Brent S. Krusor, Noble M. Johnson
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Abstract
A device includes one or more reflector components. Each reflector component comprises layer pairs of epitaxially grown reflective layers and layers of a non-epitaxial material, such as air. Vias extend through at least some of the layers of the reflector components. The device may include a light emitting layer.
Claims22
A method of making a device, comprising:
- epitaxially growing a layer stack including one or more reflective layers and one or more interstitial layers, each interstitial layer disposed between two reflective layers;
- and
- forming vias that intersect at least some of the layers;
- exposing the interstitial layers to an etchant through the vias;
- and
- etching the interstitial layers.
3 more elements
The method of claim 6, wherein forming the vias comprises forming the vias to surround a central region.
A device comprising:
- one or more reflector components, each reflector component comprising alternating epitaxially grown reflective layers and layers of a non-epitaxially grown material;
- and
- one or more vias that extend through at least some of the layers of the non-epitaxially grown material.
A device comprising:
- one or more reflector components, each reflector component comprising pairs of alternating layers of an epitaxially grown nitride system material and interstitial gaps between the reflective layers, wherein the reflector components include fewer than about 20 pairs and have a reflectivity greater than about 99%;
- and
- one or more vias that extend through at least some of the layers.
A method, comprising:
- exposing a device to an analyte, the device including a distributed Bragg reflector (DBR) comprising:
- a plurality of reflective layers;
- one or more interstitial gaps between the reflective layers;
- and
- at least one opening configured to allow entry of an analyte into the interstitial gaps;
- detecting one or more of a presence and a characteristic of the analyte based on one or more optical properties of the DBR.
3 more elements
A sensor, comprising:
- a plurality of reflective layers;
- one or more interstitial gaps between the reflective layers;
- and
- at least one opening configured to allow entry of an analyte into the interstitial gaps, wherein the plurality of reflective layers and the interstitial gaps form a distributed Bragg reflector (DBR).
1 more element
Dependencies are inferred from the claim text.