Temperature controllable gas laser oscillator
AssigneeFanuc Corporation
InventorTetsuhisa Takazane
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Abstract
A gas laser oscillator according to the present invention comprises a resonator unit, a heat exchanger through which a fluid exchanging heat with a laser gas flows, a chiller for cooling the fluid in the heat exchanger and supplying the fluid to the heat exchanger, and a heat transfer device for transferring heat of the fluid to the resonator unit. The gas laser oscillator further comprises a first flow path for supplying the fluid used for cooling the laser gas in the heat exchanger to the heat transfer device, a second flow path for supplying the fluid cooled by the chiller to the heat transfer device prior to supplying the fluid to the heat exchanger, and a switching valve for switching either one of a first flow path and a second flow path.
Claims7
A gas laser oscillator comprising:
- a resonator unit including a discharge unit for exciting a laser gas by a discharge, the resonator unit configured to oscillate a laser beam generated by excitation of the laser gas;
- a heat exchanger configured to flow a fluid therethrough to exchange heat with the laser gas;
- a chiller configured to suction the fluid in the heat exchanger, cool the fluid, and supply the fluid into the heat exchanger;
- a heat transfer device configured to transfer heat of the fluid to the resonator unit;
- a first flow path configured to supply the fluid used for cooling the laser gas in the heat exchanger from the heat exchanger to the heat transfer device;
- a second flow path configured to supply the fluid cooled by the chiller to the heat transfer device prior to supplying the fluid to the heat exchanger;
- and
- a switching valve configured to switch either one of the first flow path and the second flow path.
Dependencies are inferred from the claim text.