# US 2016/0254342 A1 · Magnetic core, inductor, and method for fabricating the magnetic core

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2016/0254342 A1
- Document ID: US20160254342A1
- Status: Published application
- Kind: A1
- Application number: 14/632,519
- Filed: 2015-02-26
- Published: 2016-09-01
- Earliest claimed: 2015-02-26
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Co., Ltd.
- Inventors: Yen-Shuo SU; Chun-Tsung KUO; Jiech-Fun LU
- Web page: https://patentgrep.com/patent/US20160254342A1

## CPC

- H10D 1/20: Inductors
- H01F 17/0033: {with the coil helically wound around a magnetic core}
- H01F 41/046: {structurally combined with ferromagnetic material}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

## Abstract

A magnetic core includes a center section having a substantially uniform thickness, and an edge section connected to and surrounding the center section. The edge section includes a bottom portion and a top portion disposed on the bottom portion, in which the bottom portion has a gradual side surface since the top portion has a steep side surface. The profile of the magnetic core can be more rectangular thereby providing better inductor performance.

## Claims

### Claim at position 1

1-8. (canceled)

### Claim 9

A magnetic core, comprising:
a center section having a substantially uniform thickness; and
an edge section connected to and surrounding the center section, the edge section comprising a bottom portion and a top portion disposed on the bottom portion, wherein the bottom portion has a gradual side surface since the top portion has a steep side surface.

### Claim 10 (depends on 9)

The magnetic core of claim 9, wherein a sum of the a thickness of the bottom portion and a thickness of the top portion is substantially equals to the thickness of the center section.

### Claim 11 (depends on 10)

The magnetic core of claim 10, wherein a ratio of the thickness of the bottom portion to the thickness of the top portion is in a range from about 2/3 to about 3/2.

### Claim 12 (depends on 9)

The magnetic core of claim 9, wherein a width of the bottom portion extended from the center section is greater than that of the top portion.

### Claim 13 (depends on 9)

The magnetic core of claim 9, wherein the bottom portion has an inclined side surface, and the top portion has a curve side surface.

### Claim 14 (depends on 9)

The magnetic core of claim 9, further comprising a middle portion disposed between the bottom portion and the top portion, wherein the middle portion has the steep side surface.

### Claim 15 (depends on 14)

The magnetic core of claim 14, wherein the bottom portion has an inclined side surface, the middle portion and the top portion respectively has a curve side surface.

### Claim 16

A semiconductor device, comprising:
a bottom conductive layer;
a bottom dielectric layer formed on the bottom conductive layer;
a magnetic core formed on the bottom dielectric layer, the magnetic core comprising:
a center section having a substantially uniform thickness; and
an edge section connected to and surrounding the center section, the edge section comprising a bottom portion and a top portion disposed on the bottom portion, wherein a side surface of the top portion is steeper than that of the bottom portion;
a top dielectric layer formed on the magnetic core; and
a top conductive layer formed on the top dielectric layer.

### Claim 17 (depends on 16)

The semiconductor device of claim 16, wherein the bottom conductive layer and the top conductive layer form a winding wire wound on the magnetic core.

### Claim 18 (depends on 16)

The semiconductor device of claim 16, wherein the bottom portion has an inclined side surface, and the top portion has a curve side surface.

### Claim 19 (depends on 16)

The semiconductor device of claim 16, further comprising a middle portion disposed between the bottom portion and the top portion, wherein a side surface of the middle portion is steeper than that of the bottom portion.

### Claim 20 (depends on 16)

The semiconductor device of claim 16, wherein the magnetic core is made of cobalt zirconium tantalum (CZT), nickel iron (NiFe), or iron nitride (FeN).

### Claim 21 (depends on 19)

The semiconductor device of claim 19, wherein the bottom portion has an inclined side surface, the middle portion has a curve surface, and the top portion has a curve surface.

### Claim 22 (depends on 16)

The semiconductor device of claim 16, wherein the bottom conductive layer and the top conductive layer are made of W, Co, Al, or Cu.

### Claim 23 (depends on 16)

The semiconductor device of claim 16, wherein the bottom dielectric layer and the top dielectric layer are made of silicon nitride, silicon carbide, nitrogen-doped silicon carbide, silicon oxynitride, oxygen-doped silicon carbide, or silicon oxide.

### Claim 24 (depends on 16)

The semiconductor device of claim 16, wherein the edge section comprises an anisotropic etched surface.

### Claim 25 (depends on 16)

The semiconductor device of claim 16, wherein a sum of a thickness of the bottom portion and a thickness of the top portion is substantially equals to the thickness of the center section.

### Claim 26 (depends on 16)

The semiconductor device of claim 16, wherein the magnetic core is not in a shape of triangle.

### Claim 27 (depends on 16)

The semiconductor device of claim 16, wherein the bottom portion is wider than the top portion.

### Claim 28 (depends on 9)

The magnetic core of claim 9, wherein the edge section has at least two slopes at an edge.
