# US 2016/0254118 A1 · Measurement Method and Electron Microscope > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2016/0254118 A1 - Document ID: US20160254118A1 - Status: Published application - Kind: A1 - Application number: 15/053,225 - Filed: 2016-02-25 - Published: 2016-09-01 - Earliest claimed: 2015-02-27 - Assignees: JEOL Ltd. - Applicants: JEOL Ltd. - Inventors: Yuji Kohno - Web page: https://patentgrep.com/patent/US20160254118A1 ## CPC - H01J 37/222: {Image processing arrangements associated with the tube} - H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} - H01J 2237/24455: Transmitted particle detectors - H01J 2237/24465: Sectored detectors, e.g. quadrants - H01J 2237/2802: Transmission microscopes - H01J 2237/2803: characterised by the imaging method - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A measurement method capable of easily measuring the directions of detector segments of a segmented detector relative to a scanning transmission electron microscope (STEM) image is provided. The measurement method is for use in an electron microscope equipped with the segmented detector having a detection surface divided into the detector segments. The measurement method is used to measure the directions of the detector segments relative to the STEM image. The method involves defocusing the STEM image to thereby cause a deviation of the STEM image and measuring the directions of the detector segments relative to the STEM image from the direction of the deviation of the STEM image (step S11). ## Claims ### Claim 1 A measurement method for use in an electron microscope equipped with a segmented detector having a detection surface that is divided into a plurality of detector segments, the method being adapted to measure the directions of the detector segments relative to at least one STEM (scanning transmission electron microscope) image, said measurement method comprising the steps of: defocusing the STEM image to thereby cause a deviation of the STEM image; and measuring the directions of the detector segments relative to the STEM image from the direction of the deviation of the STEM image. ### Claim 2 (depends on 1) The measurement method as set forth in claim 1, wherein said at least one STEM image is plural in number, and wherein, during the step of measuring the directions of the detector segments, the directions of the detector segments are found from the direction of a relative positional deviation between plural ones of said STEM images which are obtained from the same one of the detector segments but which are different in amount of defocus. ### Claim 3 (depends on 1) The measurement method as set forth in claim 1, wherein, during the step of measuring the directions of the detector segments, the directions of the detector segments are found from the direction of a relative positional deviation between plural different ones of said STEM images which are obtained from the detector segments under a defocused condition. ### Claim 4 (depends on 1) The measurement method as set forth in claim 1, wherein two STEM images are obtained as said at least one STEM image from two different ones of the detector segments under a defocused condition, and wherein, during the step of measuring the directions of the detector segments, an image is generated by subtracting one of these two STEM images from the other. ### Claim 5 (depends on 4) The measurement method as set forth in claim 4, wherein said two detector segments are located at opposite positions. ### Claim 6 An electron microscope for obtaining at least one STEM (scanning transmission electron microscope) image by detecting electrons transmitted through a sample, said electron microscope comprising: a segmented detector having a detection surface for detecting the electrons transmitted through the sample, the detection surface being divided into a plurality of detector segments; and an arithmetic section for finding the directions of the detector segments relative to the STEM image; wherein said arithmetic section performs processing to find the directions of the detector segments relative to the STEM image from the direction of a deviation of the STEM image caused by defocusing. ### Claim 7 (depends on 6) The electron microscope as set forth in claim 6, wherein said at least one STEM image is plural in number, and wherein said arithmetic section performs processing to find the directions of the detector segments from the direction of a relative positional deviation between plural ones of the STEM images which are obtained from the same one of the detector segments but which are different in amount of defocus. ### Claim 8 (depends on 6) The electron microscope as set forth in claim 6, wherein said arithmetic section performs processing to find the directions of the detector segments from the direction of a relative positional deviation between the STEM images obtained from different ones of the detector segments under a defocused condition. ### Claim 9 (depends on 6) The electron microscope as set forth in claim 6, further comprising a control unit for providing control based on the directions of the detector segments found by the arithmetic section to vary the directions of the detector segments. ### Claim 10 An electron microscope for obtaining STEM images by detecting electrons transmitted through a sample, said electron microscope comprising: a segmented detector having a detection surface for detecting the electrons transmitted through the sample, the detection surface being divided into a plurality of detector segments; and an image processor for performing processing to generate an image indicating the directions of the detector segments relative to the STEM images; wherein said image processor generates this image by subtracting one of two STEM images from the other, the two STEM images being obtained from two different ones of the detector segments under a defocused condition. ### Claim 11 (depends on 10) The electron microscope as set forth in claim 10, wherein said two detector segments are located at opposite positions.