# US 2016/0252591 A1 · Method for measuring three-dimensional magnetic fields > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2016/0252591 A1 - Document ID: US20160252591A1 - Status: Published application - Kind: A1 - Application number: 15/028,103 - Filed: 2014-10-01 - Published: 2016-09-01 - Earliest claimed: 2013-10-11 - Assignees: Crocus Technology SA - Applicants: Crocus Technology SA - Inventors: Sebastien Bandiera - Web page: https://patentgrep.com/patent/US20160252591A1 ## CPC - G01R 33/098: {comprising tunnel junctions, e.g. tunnel magnetoresistance sensors} - G11C 11/1673: {Reading or sensing circuits or methods} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) - G11C: STATIC STORES (semiconductor memory devices H10B) ## Abstract Method for sensing an external magnetic field using a magnetic sensor cell including: a magnetic tunnel junction including a reference layer having a reference magnetization oriented parallel to the plane of the reference layer, a sense layer having a sense magnetization, and a tunnel barrier layer between the sense and reference layers. A field line is configured for passing a field current for providing a sense magnetic field adapted for aligning the sense magnetization. The sense layer magnetization is orientable between a direction parallel to the plane of the sense layer and a direction perpendicular to the plane of the sense layer when the sense magnetic field is provided. The external magnetic field includes an in-plane component oriented parallel to the plane of the sense layer and an out-of-plane component perpendicular to the plane of the sense layer. The method includes sensing the out-of-plane component; and sensing the in-plane component. ## Claims ### Claim at position 1 1-15. (canceled) ### Claim 16 Method for sensing an external magnetic field using a magnetic sensor cell comprising: a magnetic tunnel junction including a reference layer having a reference magnetization oriented substantially parallel to the plane of the reference layer, a sense layer having a sense magnetization, and a tunnel barrier layer between the sense and reference layers; and a field line configured for passing a field current for providing a sense magnetic field adapted for aligning the sense magnetization; the sense layer magnetization being orientable between a direction parallel to the plane of the sense layer and a direction perpendicular to the plane of the sense layer when the sense magnetic field is provided; the external magnetic field comprising an in-plane component oriented parallel to the plane of the sense layer and an out-of-plane component perpendicular to the plane of the sense layer; the method comprising: sensing the out-of-plane component; and sensing the in-plane component; wherein the step of sensing the out-of-plane component comprises determining the exclusive magnitude of the out-of-plane component. ### Claim 17 (depends on 16) The method according to claim 16, wherein the sense magnetization is initially oriented perpendicular to the plane of the sense layer; and wherein said sensing the out-of-plane component comprises passing the field current for providing the sense magnetic field with a parallel component parallel to the plane of the sense layer such as to align the sense magnetization from its initial direction to an aligned direction being at least partly oriented parallel to the plane of the sense layer. ### Claim 18 (depends on 17) The method according to claim 17, further comprising measuring a resistance of the magnetic tunnel junction and determining a slope of the measured resistance as a function of the field current; and determining the magnitude of the out-of-plane component using the determined slope. ### Claim 19 (depends on 17) The method according to claim 17, wherein the field current is such that the aligned direction of the sense magnetization is saturated, respectively, parallel or perpendicular to the plane of the sense layer; and wherein the method further comprises determining the magnitude of the out-of-plane component using the value of the field current for saturating the sense magnetization. ### Claim 20 (depends on 19) The method according to claim 19 wherein the magnetic tunnel junction further comprises a bias layer generating a bias magnetic field perpendicular to the plane of the sense layer; and wherein the method further comprises determining a direction of the out-of-plane component using the value of the field current for saturating the sense magnetization or determining a slope of the measured resistance as a function of the field current and comparing this value to a calibrated value of field current for a known out-of-plane component. ### Claim 21 (depends on 16) The method according to claim 16 wherein the sense magnetization is initially oriented parallel to the plane of the sense layer; and wherein said sensing the out-of-plane component comprises passing the field current for providing the sense magnetic field with a perpendicular component perpendicular to the plane of the sense layer such as to saturate the sense magnetization from its initial direction to a saturated direction being oriented perpendicular to the plane of the sense layer. ### Claim 22 (depends on 21) The method according to claim 21 further comprising determining a direction and magnitude of the out-of-plane component) using the magnitude of the field current required for saturating the sense magnetization and measuring an intermediate resistance of the magnetic tunnel junction when the sense magnetization is in the saturated direction. ### Claim 23 (depends on 16) The method according to claim 16, wherein sensing the out-of-plane component is performed prior to sensing the in-plane component. ### Claim 24 (depends on 23) The method according to claim 23 wherein sensing the in-plane component comprises using a calibration curve relating a change of sensitivity of the magnetic tunnel junction to the in-plane component to the out-of-plane component. ### Claim 25 (depends on 16) The method according to claim 16, wherein said sensing the in-plane component comprises: passing the field current for providing the sense magnetic field with the parallel component, the field current having a first magnitude and a first polarity such as to saturate the sense magnetization parallel to the reference magnetization; passing the field current for providing the sense magnetic field with the parallel component, the field current having a second magnitude and a second polarity opposed to the first polarity such as to saturate the sense magnetization antiparallel to the reference magnetization; comparing the first and second magnitudes of the field current. ### Claim 26 (depends on 16) The method according to claim 16, wherein the field line comprises a first line portion for passing a first field current and a second line portion for passing a second field current, the first and second line portions being arranged parallel to the plane of the sense layer; and wherein said passing a field current comprises passing the first and second field current portions. ### Claim 27 (depends on 26) The method according to claim 26, wherein the first and second field current portions are passed with the same polarity such that the sense magnetic field comprises only the parallel component. ### Claim 28 (depends on 26) The method according to claim 26, wherein the first field current portion has a polarity that is opposed to the one of the second field current portion; and wherein the first and second field current portions are passed with the same magnitude such that the sense magnetic field comprises only the perpendicular component. ### Claim 29 (depends on 26) The method according to claim 26, wherein the first field current portion has a polarity that is opposed to the one of the second field current portion; and wherein the magnitude of the first field current portion differs from the one of the second field current portion such that the sense magnetic field comprises the parallel component and the perpendicular component. ### Claim 30 (depends on 29) The method according to claim 29, wherein the magnitudes of the first and second field current portions are such that the magnitude and direction of the perpendicular component cancels out the perpendicular component.