# US 2016/0252546 A1 · Systems and Methods for Manufacturing Nano-Electro-Mechanical-System Probes

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- Number: US 2016/0252546 A1
- Document ID: US20160252546A1
- Status: Published application
- Kind: A1
- Application number: 15/054,626
- Filed: 2016-02-26
- Published: 2016-09-01
- Earliest claimed: 2015-02-26
- Assignees: Xallent, LLC
- Applicants: Xallent, LLC
- Inventors: Kwame Amponsah
- Web page: https://patentgrep.com/patent/US20160252546A1

## CPC

- G01Q 70/06: Probe tip arrays
- B41J 2/16526: {by applying pressure only}
- G01Q 60/30: Scanning potential microscopy
- G01Q 70/10: Shape or taper
- G01Q 70/14: Particular materials
- G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

Systems and methods for manufacturing multiple integrated tip probes for scanning probe microscopy. According to an embodiment is a microscope probe configured to analyze a sample, the microscope probe including: a movable probe tip including a terminal probe end; a first actuator configured to displace the movable probe tip along a first axis; and a detection component configured to detect motion of the movable probe tip in response to an applied signal; where the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.

## Claims

### Claim 1

A microscope probe configured to analyze a sample, the microscope probe comprising:
a movable probe tip comprising a terminal probe end, wherein the moveable probe tip comprises a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe end extending past the supporting layer.

### Claim 2 (depends on 1)

The microscope probe of claim 1, further comprising:
a first actuator configured to displace the movable probe tip along a first axis; and
a detection component configured to detect motion of the movable probe tip in response to an applied signal.

### Claim 3 (depends on 1)

The microscope probe of claim 1, wherein said metal is platinum, gold, tungsten, or nickel.

### Claim 4 (depends on 1)

The microscope probe of claim 1, wherein said supporting layer is silicon, silicon dioxide, or silicon nitride.

### Claim 5 (depends on 1)

The microscope probe of claim 1, wherein the microscope probe comprises a plurality of probe tips each comprising a terminal probe end, each of the plurality of probe tips further comprising a metal layer affixed to a supporting layer, at least a portion of the metal layer at the terminal probe ends extending past the supporting layer.

### Claim 6 (depends on 5)

The microscope probe of claim 5, further comprising an insulated interdigitated structure positioned between each of the plurality of probe tips.

### Claim 7

A microscope probe configured to analyze a sample, the microscope probe comprising:
a plurality of probe tips; and
an insulated interdigitated structure positioned between each of the plurality of probe tips.

### Claim 8 (depends on 7)

The microscope probe of claim 7, further comprising a first actuator configured to displace at least one of the plurality of probe tips along a first axis; and a detection component configured to detect motion of the at least one of the plurality of probe tips in response to an applied signal.

### Claim 9

A microscope probe configured to analyze a sample, the microscope probe comprising:
a first probe tip; and
a second probe tip positioned a first distance from the first probe tip, wherein the second probe tip is positioned vertically underneath the first probe tip.

### Claim 10 (depends on 9)

The microscope probe of claim 9, further comprising a first actuator configured to displace at least one of the first and second probe tips along a first axis; and a detection component configured to detect motion of the at least one of the first and second probe tips in response to the sample.

### Claim 11 (depends on 9)

The microscope probe of claim 9, wherein said first and second probe tips comprise a metal.

### Claim 12 (depends on 11)

The microscope probe of claim 11, wherein the first and second probe tips comprise the same metal.

### Claim 13 (depends on 11)

The microscope probe of claim 11, wherein the first and second probe tips each comprise a different metal.

### Claim 14

A microscope probe configured to analyze a sample, the microscope probe comprising:
a movable probe tip supported by a substrate;
a first actuator configured to displace the movable probe tip along a first axis; and
a detection component configured to detect motion of the movable probe tip in response to an applied signal;
a resonator configured to vibrate when the probe is in a vibrational mode; and
a capacitor affixed to the substrate.

### Claim 15

A method for analyzing a sample using a microscope probe, the method comprising the steps of:
providing a microscope probe comprising: (i) a movable probe tip supported by a substrate; (ii) a resonator configured to vibrate when the probe is in a vibrational mode; and (iii) a capacitor affixed to the substrate;
receiving a current from the capacitor;
receiving a current from the resonator;
electrically combining the current from the capacitor and the current from the resonator; and
using the electrically combined current to improve a signal-to-noise ratio of the sample analysis.

### Claim 16

A method for implementing a transistor using multiple integrated probe tips, the method comprising the steps of:
providing a sample;
providing a microscope probe comprising a plurality of probe tips;
contacting a first, outer probe tip of the plurality of probe tips to the sample, wherein the first outer probe tip is configured to act as a source terminal for the transistor;
contacting a second, outer probe tip of the plurality of probe tips to the sample, wherein the second outer probe tip is configured to act as a drain terminal for the transistor;
using a third, inner probe tip of the plurality of probe tips as a gate terminal for the transistor; and
characterizing the sample with the plurality of probe tips.

### Claim 17 (depends on 16)

The method of claim 16, wherein the inner probe tip comprises a dielectric coating, and further wherein the dielectric coating is in contact with the surface.

### Claim 18

A method for implementing a variable resistor, the method comprising the steps of:
providing a sample;
providing a microscope probe comprising a plurality of probe tips;
contacting a first, outer probe tip of the plurality of probe tips to the sample;
contacting a second, outer probe tip of the plurality of probe tips to the sample;
contacting a third, inner probe tip of the plurality of probe tips to the sample;
applying a voltage to either of the first and second outer probe tips, wherein the inner probe tip is deflected toward either the first or second outer probe tips; and
characterizing the sample based on the deflection of the inner probe tip.