Quartz Glass Part and Fabrication Method for Quartz Glass Part
AssigneesTechno Quartz Inc., Tocalo Co., Ltd.
InventorsHiromichi Isogai, Masahide Kato, Yasuhiro Umetsu, Ryo Yamazaki, Yoichiro Habu
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Abstract
A quartz glass part silicon powder is plasma-sprayed onto a surface of a quartz glass substrate and thereby a coating film is formed, the quartz glass substrate is composed of opaque quartz glass a fraction of grains having a diameter of 100 μm or larger in the silicon powder is 3% or smaller.
Claims15
1-14. (canceled)
A quartz glass part constructed such that silicon powder is plasma-sprayed onto a surface of a quartz glass substrate and thereby a coating film is formed, wherein
- the quartz glass substrate is composed of opaque quartz glass and a fraction of grains having a diameter of 100 μm or larger in the silicon powder is 3% or smaller.
A fabrication method for a quartz glass part, comprising:
- preparing on an opaque quartz glass substrate;
- and
- forming a coating film by thermal-spraying silicon powder, in which a fraction of grains having a diameter of 100 μm or larger is 3% or smaller, onto a surface of the quartz glass substrate.
A quartz glass part constructed such that silicon powder is thermal-sprayed onto a quartz glass substrate and thereby a coating film is formed on the surface, wherein:
- the quartz glass substrate is composed of transparent quartz glass;
- a fraction of grains having a diameter of 100 μm or larger in the silicon powder is 0%;
- a D50% grain diameter in the silicon powder is 25 to 35 μm;
- an average film thickness of the coating film is 40 to 60 μm;
- and
- a surface roughness Ra of the quartz glass substrate is 1 to 3 μm.
A fabrication method for a quartz glass part, comprising:
- preparing a coating film formed on a transparent quartz glass substrate with a surface roughness Ra of 1 to 3 μm;
- and
- forming a coating film with an average film thickness of 40 to 60 μm by thermal-spraying silicon powder, in which a fraction of grains having a diameter of 100 μm or larger is 0% and a D50% grain diameter is 25 to 35 onto a surface of the quartz glass substrate.
Dependencies are inferred from the claim text.