Conveying hand and lithography apparatus
AssigneeCanon Kabushiki Kaisha
InventorYasunao Matsuhira
Life of this patent
Estimating the term…
Abstract
This conveying hand is used for conveying a conveyed object in an adsorbed state with a negative pressure, and comprises a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated; a base that moves while loading the pad; a first elastic member that movably supports the pad on the base in the direction of gravity of the conveyed object and restricts a movement of the pad on the base in the direction perpendicular to the direction of gravity; and a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity.
Claims11
A conveying hand for conveying a conveyed object in an adsorbed state with a negative pressure comprising:
- a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated;
- a base that moves while loading the pad;
- a first elastic member that movably supports the pad on the base in a direction of gravity of the conveyed object and restricts a movement of the pad with respect to the base in a direction perpendicular to the direction of gravity;
- and
- a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity.
A lithography apparatus including a conveying hand for conveying a conveyed object in an adsorbed state with a negative pressure and a processing unit that processes a substrate that has been conveyed by the conveying hand,
- wherein the conveying hand comprises:
- a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated;
- a base that moves while loading the pad;
- a first elastic member that movably supports the pad on the base in a direction of gravity of the conveyed object and restricts a movement of the pad with respect to the base in a direction perpendicular to the direction of gravity;
- and
- a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity.
Dependencies are inferred from the claim text.