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US 2016/0243672 A1Published application
Polishing pad dresser, polishing apparatus and polishing pad dressing method
AssigneeKabushiki Kaisha Toshiba
InventorsTakayuki NAKAYAMA, Dai FUKUSHIMA
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Abstract
In one embodiment, a polishing pad dresser includes a first base portion, and first convex portions provided in a first region of the first base portion. Furthermore, a width of the first convex portions is 1 to 10 μm, a height of the first convex portions is 0.5 to 10 μm, and a density of the first convex portions in the first region is 0.1 to 50%.
Claims20
A polishing pad dresser comprising:
- a first base portion;
- and
- first convex portions provided in a first region of the first base portion,
- wherein
- a width of the first convex portions is 1 to 10 μm,
- a height of the first convex portions is 0.5 to 10 μm, and
- a density of the first convex portions in the first region is 0.1 to 50%.
4 more elements
A polishing apparatus comprising:
- a polishing pad configured to polish a substrate;
- a polishing head configured to hold the substrate to bring the substrate into contact with the polishing pad;
- and
- a polishing pad dresser including a first base portion and first convex portions provided in a first region of the first base portion, and configured to dress the polishing pad with the first convex portions,
- wherein
- a width of the first convex portions is 1 to 10 μm,
- a height of the first convex portions is 0.5 to 10 μm, and
- a density of the first convex portions in the first region is 0.1 to 50%.
5 more elements
A polishing pad dressing method comprising:
- preparing a polishing pad dresser including a first base portion and first convex portions provided in a first region of the first base portion, a width of the first convex portions being 1 to 10 μm, a height of the first convex portions being 0.5 to 10 μm, and a density of the first convex portions in the first region being 0.1 to 50%;
- and
- dressing a polishing pad with the first convex portions of the polishing pad dresser.
Dependencies are inferred from the claim text.