Load measuring apparatus and load measuring method
AssigneeEbara Corporation
InventorHideaki Tanaka
Life of this patent
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Abstract
A load measuring apparatus includes a waterproof load cell having a load measuring surface, of which the length is substantially equal to a diameter of the substrate, and a base plate that supports the waterproof load cell. The load measuring apparatus is set in a substrate cleaning apparatus like a substrate, and measures a load applied from the roll cleaning tool of the substrate cleaning apparatus using the waterproof load cell.
Claims7
A load measuring apparatus that measures a load applied to a substrate from a roll cleaning tool, the load measuring apparatus comprising:
- a waterproof load cell including a load measuring surface having a length that is substantially equal to a diameter of the substrate;
- and
- a base plate that supports the waterproof load cell.
A load measuring method that measures a load applied to a substrate from a roll cleaning tool, the load measuring method comprising:
- holding a load measuring apparatus including a waterproof load cell by a substrate holding mechanism, the waterproof load cell including a load measuring surface having a length that is substantially equal to a diameter of the substrate;
- pressing the roll cleaning tool against the waterproof load cell while rotating the roll cleaning tool around an axial center thereof;
- and
- measuring the load applied to the waterproof load cell from the roll cleaning tool while supplying a cleaning liquid to the roll cleaning tool that is rotating.
Dependencies are inferred from the claim text.