Method for structuring layers of oxidizable materials by means of oxidation and substrate having a structured coating
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsMatthias KAMP, Jonas BARTSCH, Markus GLATTHAAR
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Abstract
The invention relates to a method for structuring layers of oxidizable materials. At least one layer, disposed on a substrate, of an oxidizable material is hereby subjected to local oxidation with at least one oxidation step. In the case of the latter, at least one selected region of the layer of the oxidizable material is oxidized such that the layer, after oxidation, is subdivided into regions, which are electrically insulated from each other, by at least one oxidized region extending across the entire layer thickness after the oxidation.
Claims21
1-26. (canceled)
A method for structuring layers of oxidisable materials, in which at least one layer, disposed on a substrate, of an oxidisable material is subjected to local oxidation with at least one oxidation step, in which at least one selected region of the layer of oxidisable material is oxidised so that the layer, after the last oxidation step, is subdivided into regions, which are electrically insulated from each other, by at least one oxidising region extending over the entire layer thickness, wherein oxidation of the layer is effected utilizing an oxidising medium and also a metering device for metering the oxidising medium, the oxidising medium being in contact, during oxidation, both with the metering device and with the layer, and an electrical voltage of 1-100 V being applied between the metering device and the layer, by means of which a current flow through the oxidising medium results.
A substrate with structured coating, the substrate having a layer of an oxidisable material which is subdivided locally into at least two regions, which are electrically insulated from each other, by at least one oxidised region.
Dependencies are inferred from the claim text.