Structure and formation method of finfet device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Hsuan LEE, Cheng-Yu YANG, Hsiang-Ku SHEN, Han-Ting TSAI, Yimin HUANG
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Hsuan LEE, Cheng-Yu YANG, Hsiang-Ku SHEN, Han-Ting TSAI, Yimin HUANG
Estimating the term…
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a semiconductor substrate and a fin structure over the semiconductor substrate. The semiconductor device structure also includes a gate stack over a portion of the fin structure, and the fin structure includes an intermediate portion under the gate stack and upper portions besides the intermediate portion. The semiconductor device structure further includes a contact layer over the fin structure. The contact layer includes a metal material, and the upper portions of the fin structure also include the metal material.
A semiconductor device structure, comprising:
A semiconductor device structure, comprising:
A method for forming a semiconductor device structure, comprising:
Dependencies are inferred from the claim text.