Methods and Systems for Fabricating High Quality Superconducting Tapes
OwnerGoran Majkic, Venkat Selvamanickaminventors
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Abstract
An MOCVD system fabricates high quality superconductor tapes with variable thicknesses. The MOCVD system can include a gas flow chamber between two parallel channels in a housing. A substrate tape is heated and then passed through the MOCVD housing such that the gas flow is perpendicular to the tape's surface. Precursors are injected into the gas flow for deposition on the substrate tape. In this way, superconductor tapes can be fabricated with variable thicknesses, uniform precursor deposition, and high critical current densities.
Claims20
A superconductor tape prepared by metal organic chemical vapor deposition, the superconductor tape comprising a film thickness greater than approximately 1.5 μm and a critical current density greater than approximately 4 MA/cm2 at 77 K in a zero applied magnetic field.
A superconductor tape prepared by metal organic chemical vapor deposition, the superconductor tape comprising a film thickness greater than approximately 2 μm and non c-axis grain orientation less than approximately 10%.
A superconductor tape prepared by metal organic chemical vapor deposition, the superconductor tape comprising a precursor to film conversion efficiency greater than approximately 20% of theoretical value.
A superconductor tape prepared by a metal organic chemical vapor deposition process comprising the steps of:
- preheating a superconductor substrate tape with a first roller and a second roller;
- delivering the pre-heated superconductor substrate tape to a groove in a housing via the first roller and the second roller, wherein the groove is in fluid communication with a chamber;
- and
- flowing superconductor precursors in a gas phase through the chamber, wherein the precursors are deposited on the superconductor substrate tape by thermally-activated reaction.
The superconductor of claim 16, further prepared by a metal organic chemical vapor deposition process comprising the steps of:
- pre-heating the superconductor substrate tape via Ohmic heating.
Dependencies are inferred from the claim text.