Systems and methods of controlling a manufacturing process for a microelectronic component

A method of controlling a manufacturing process for a microelectronic component comprising:

• determining a specification range for a desired parameter of the microelectronic component;
• processing the microelectronic component in a manufacturing tool;
• recording a sensor data while processing the microelectronic component in the manufacturing tool;
• determining an estimated sensor data parameter with the sensor data;
• measuring a first measured value of the microelectronic component in a single measurement tool;
• determining an estimated desired parameter using the first measured value and the estimated sensor data parameter;
• and
• adjusting the manufacturing process when the estimated desired parameter is outside of the specification range.

A system for controlling a manufacturing process for a microelectronic component comprising:

• a manufacturing tool comprising a manufacturing tool sensor, wherein the manufacturing tool is configured to process the microelectronic component, and wherein the manufacturing tool sensor is configured to produce a trace data set during processing within the manufacturing tool;
• a measurement tool configured to receive the microelectronic component after processing in the manufacturing tool, and wherein the measurement tool is further configured to measure a first measured value of the microelectronic component;
• and
• a computer configured to receive the trace data set from the manufacturing tool and the first measured value from the measurement tool, wherein the computer is configured to produce an estimated trace data parameter of the microelectronic component with the trace data set, and wherein the computer is configured to determine an estimated desired parameter with a model, wherein the model is configured to use the estimated trace data parameter and the first measured value to determine the estimated desired parameter, and wherein the computer is configured to adjust the manufacturing process when the estimated desired parameter is outside of a specification range.