Exposure device and exposure method
AssigneesBoe Technology Group Co., Ltd., Beijing Boe Optoelectronics Technology Co., Ltd.
InventorsHaitao MA, Haisheng ZHAO
Life of this patent
Estimating the term…
Abstract
An exposure device and an exposure method are provided. The exposure device includes an exposure lamp, a mask plate and a marking equipment. The marking equipment includes a guide rail frame disposed on the mask plate, and at least one marking vehicle disposed on the guide rail frame, a controller. The controller acts to make the guide rail frame move to a corresponding exposure location on the mask plate earlier than the exposure lamp under its control, and to make the marking vehicle lie in a corresponding marking location by dint of its control, for displaying a corresponding marking identification.
Claims20
An exposure device, comprising:
- an exposure lamp, a mask plate and a marking equipment, the marking equipment comprising:
- a guide rail frame, disposed on the mask plate;
- at least one marking vehicle, disposed on the guide rail frame;
- a controller, configured to control the guide rail frame move to a corresponding exposure location on the mask plate earlier than the exposure lamp, and to control the marking vehicle lie in a corresponding marking location, for displaying a corresponding marking identification.
Dependencies are inferred from the claim text.