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US 2016/0238931 A1Published application
Photoimageable compositions containing photobase generators
AssigneePromerus, LLC
InventorsHendra NG, Wei ZHANG
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Abstract
Embodiments in accordance with the present invention encompass negative-tone, solvent developable, self-imageable polymer compositions containing photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays.
Claims15
A photoimageable solvent developable negative tone composition comprising:
- a) a polymer having one or more repeating units of formula (IA) derived from a monomer of formula (I):
- wherein represents a position at which the bonding takes place with another repeat unit;
- R1 is (C6-C18)alkyl;
- perfluoro(C1-C18)alkyl;
- (C6-C10)aryl(C1-C6)alkyl;
- —(CH2)a—CO2R2 where a is an integer from 0 to 4, and R2 is selected from hydrogen and (C1-C4)alkyl;
- a group of formula (A):
- —(CH2)b—(OCH2—CH2)c—OR (A);
- and
- a group of formula (B):
- wherein:
- b is an integer from 0 to 10;
- c is an integer 0, 1, 2, 3 or 4;
- and
- R is hydrogen, linear or branched (C1-C6)alkyl, (C5-C8)cycloalkyl, (C6-C10)aryl or (C7-C12)aralkyl;
- b) a photobase generator;
- and
- c) a carrier solvent.
15 more elements
Dependencies are inferred from the claim text.