Back to results
US 2016/0238549 A1Published application
Fluid sensor chip and method for manufacturing the same
AssigneeInfineon Technologies AG
InventorsGuenther Ruhl, Florian Bachl
Life of this patent
Estimating the term…
Abstract
A fluid sensor chip includes an isolator substrate including amorphous carbon, an electrical conductor including graphite and an active material including graphene or carbon nanotubes.
Claims9
A method for manufacturing a fluid sensor chip, comprising:
- providing a substrate carrier;
- providing a conductive layer on the substrate carrier;
- forming an isolator substrate comprising amorphous carbon above the substrate carrier and the conductive layer;
- providing an electrical conductor comprising graphite, such that the electrical conductor extends through the isolator substrate and contacts the conductive layer;
- and
- depositing an active material comprising graphene or carbon nanotubes onto the isolator substrate and the electrical conductor.
3 more elements
Dependencies are inferred from the claim text.