Heated sensitive layer gas sensor
AssigneesUniversite D'Aix-Marseille, Centre National De La Recherche Scientifique
InventorsKhalifa AGUIR, Marc BENDAHAN, Virginie Marie LAITHIER MARTINI
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Abstract
The invention relates to a heated sensitive layer sensor comprising an insulating substrate bearing the sensitive layer; two complementary measurement electrodes in the form of two adjacent conductive tracks configured in electrical contact with the sensitive layer; and a heating element in the form of a resistive track arranged on the substrate for uniformly heating an active area of the sensitive layer. The resistive track comprises at least three power supply points regularly spaced over the length of the resistive track, and each point of even rank is supplied at a first supply voltage and each point of odd rank is supplied at a second supply voltage.
Claims7
A heated sensitive layer sensor, comprising:
- an insulating substrate bearing the sensitive layer;
- two complementary measurement electrodes in the form of two adjacent conductive tracks configured in electrical contact with the sensitive layer;
- and
- a heating element in the form of a resistive track arranged on the substrate for uniformly heating an active area of the sensitive layer;
- wherein the resistive track comprises at least three power supply points regularly spaced over the length of the resistive track, and each point of odd rank is supplied by a same first supply voltage and each point of even rank is supplied by a same second supply voltage.
Dependencies are inferred from the claim text.