Particle detector
AssigneeAzbil Corporation
InventorsMasashi FURUYA, Daisuke OBARA
Life of this patent
Estimating the term…
Abstract
A particle detector that includes a flow cell that includes a through hole having a circular sectional shape and allowing a fluid containing a particle to flow therethrough, an inspection light source that irradiates the flow cell with inspection light in a direction perpendicular to an extending direction of the through hole, and an optical detector that detects reaction light generated by the particle and which exits the flow cell so as to be angled relative to a sector-shaped plane which has a vertex at an intersection point of the inspection light and the through hole of the flow cell, is parallel to an optical path of the inspection light, and is perpendicular to the extending direction of the through hole of the flow cell.
Claims20
A particle detector, comprising:
- a flow cell that is transparent and includes a through hole having a circular sectional shape, the through hole being configured to allow a fluid containing a particle to flow therethrough;
- an inspection light source configured to irradiate the flow cell with inspection light in a direction perpendicular to an extending direction of the through hole;
- and
- an optical detector configured to defect reaction light generated by the particle irradiated with the inspection light in the flow cell, the reaction light exiting the flow cell so as to be angled relative to a sector-shaped plane, wherein the plane has a vertex at an intersection point of the inspection light and the through hole of the flow cell, is parallel to an optical path of the inspection light, and is perpendicular to the extending direction of the through hole of the flow cell.
A particle detector, comprising:
- a flow cell that is transparent and includes a through hole having a circular sectional shape and being configured to allow a fluid containing a particle to flow therethrough, the flow cell including a projection included in an optical path of inspection light;
- an inspection light source configured to irradiate the flow cell with the inspection light in a direction perpendicular to an extending direction of the through hole;
- and
- an optical detector configured to detect reaction light generated by the particle irradiated with the inspection light in the flow cell.
A particle detector, comprising:
- a flow cell that is transparent and includes a through hole having a circular sectional shape, the through hole being configured to allow a fluid containing a particle to flow therethrough;
- an inspection light source configured to irradiate the flow cell with inspection light in a direction perpendicular to an extending direction of the through hole;
- a stray light attenuation member that is disposed so as to include a sector-shaped plane which has a vertex at an intersection point of the inspection light and the through hole of the flow cell, which is parallel to an optical path of the inspection light, and which is perpendicular to the extending direction of the through hole of the flow cell;
- and
- an optical detector that is disposed farther from the flow cell than the stray light attenuation member and is configured to detect the reaction light generated by the particle irradiated with the inspection light in the flow cell.
Dependencies are inferred from the claim text.