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US 2016/0238467 A1Published application
Method for fabricating a pressure sensor
AssigneeBoard of Regents, The University of Texas System
InventorsTUSHAR SHARMA, XIAOJING ZHANG
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Abstract
A method of fabricating a pressure sensor is disclosed. Initially, a first metal is deposited on top of a substrate, and the first metal is patterned accordingly. A PVDF-TrFE nano fiber is then deposited on top of the first metal layer, and the PVDF-TrFE nano fiber is etched. A second metal layer is subsequently deposited on top of the PVDF-TrFE nano fiber, and the second metal layer is etched to form a pressure sensor.
Claims14
A pressure sensor comprising;
- a substrate;
- a PVDF fiber having a core and a core shell;
- a first electrode located between said PVDF fiber and said substrate;
- a second electrode located opposite said first electrode with said PVDF fiber located between said first and second electrodes;
- a first terminal connecting said first and second electrodes;
- and
- a second terminal connecting said core within said PVDF fiber, wherein a number of charges induced within said PVDF fiber caused by any pressure applied to said PVDF fiber is configured to be measured via said first and second terminals.
4 more elements
A method of fabricating a sensor, said method comprising:
- depositing and patterning a first metal layer on top of a substrate;
- depositing a PVDF nano fiber on top of said substrate, making contact with said first metal layer;
- etching said PVDF nano fiber;
- depositing a second metal layer on top of said PVDF nano fiber;
- and
- etching said second metal layer to form a pressure sensor.
3 more elements
A method of fabricating a sensor, said method comprising:
- depositing and patterning a first metal layer on top of a substrate;
- depositing a PVDF-TrFE nano fiber on top of said substrate, making contact with said first metal layer;
- etching said PVDF-TrFE nano fiber;
- depositing a second metal layer on top of said PVDF-TrFE nano fiber;
- and
- etching said second metal layer to form a pressure sensor.
3 more elements
Dependencies are inferred from the claim text.