Image measuring method and image measuring apparatus

An image measuring apparatus that images an object to be measured having a horizontal plurality of planes on which the object to be measured is mounted and calculates a shape of the object to be measured based on the image of the object to be measured, the apparatus comprising:

• a height measuring unit configured to measure a height of the object to be measured at a plurality of positions of the plurality of planes on the object to be measured;
• a calculating unit configured to calculate positions of a plurality of planes based on the height measured by the height measuring unit;
• an imaging unit configured to align the focus position with each of the plurality of planes calculated by the calculating unit and image the object to be measured;
• and
• a calculating unit configured to calculate the shape of the object to be measured based on the image of the object to be measured imaged by the imaging unit.