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US 2016/0237591 A1Published application
Group iv nanowires grown from inductively or resistively heated substrates
AssigneeCornell University
InventorsTobias HANRATH, Benjamin T. RICHARDS
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Abstract
Growth of Group IV nanowires with a substrate and a Group IV metalloid is performed using resistive or inductive heating of the substrate. A roll-to-roll process enables a metal surface to move through a reaction environment while reacting with a stream or bath of precursor to form the nanowire-metal complex. The Group IV nanowires on a surface of the substrate can have a surface loading greater than 10 mg/cm2.
Claims20
A method comprising:
- exposing a flexible substrate to a Group IV precursor during a roll-to-roll process;
- and
- heating the substrate during the exposing such that a plurality of Group IV nanowires grow on a surface of the substrate, wherein the substrate is resistively heated by passing a current through the substrate or inductively heated by inducing a current in the substrate.
An article comprising:
- a flexible substrate;
- and
- a plurality of Group IV nanowires disposed on a surface of the substrate, wherein the Group IV nanowires on the surface have a surface loading greater than 10 mg/cm2.
An apparatus comprising:
- a reactor chamber configured for roll-to-roll processing of a flexible substrate;
- a Group IV precursor supply connected to the reactor chamber;
- and
- a heating system configured to resistively heat by passing a current through the substrate or inductively heat by inducing a current in the substrate.
1 more element
Dependencies are inferred from the claim text.