Mems pressure sensor and method for forming the same

A method for forming a Micro-Electro Mechanical System (MEMS) pressure sensor, comprising:

• preparing a first substrate, wherein the first substrate comprises a first surface and a second surface opposite to the first surface, and the first substrate comprises at least one conductive layer arranged on the side of the first surface of the first substrate;
• preparing a second substrate, wherein the second substrate comprises a third surface and a fourth surface opposite to the third surface, the second substrate comprises a second base and a pressure-sensing electrode arranged on or above or in the second base, the second substrate comprises a pressure sensing region in which the pressure-sensing electrode is arranged, and the pressure-sensing electrode is arranged on the side of the third surface of the second substrate;
• bonding the first surface of the first substrate and the third surface of the second substrate with each other;
• forming a cavity between the first substrate and the pressure sensing region of the second substrate;
• thinning the second substrate from the fourth surface of the second substrate by partially removing the second base, to form a fifth surface opposite to the third surface of the second substrate;
• and
• forming a first conductive plug passing through the second substrate from the side of the fifth surface of the second substrate to the at least one conductive layer, wherein the first conductive plug is used to electrically connect the conductive layer to the pressure-sensing electrode.

A Micro-Electro Mechanical System (MEMS) pressure sensor, comprising:

• a first substrate, wherein the first substrate comprises a first surface and a second surface opposite to the first substrate, and the first substrate comprises at least one conductive layer arranged on the side of the first surface of the first substrate;
• a second substrate, wherein the second substrate comprises a third surface and a fifth surface opposite to the third surface, the second substrate comprises a pressure-sensing electrode, and the second substrate comprises a pressure sensing region in which the pressure-sensing electrode is arranged, the first surface of the first substrate and the third surface of the second substrate are bonded with each other;
• a cavity formed between the first substrate and the pressure sensing region of the second substrate;
• and
• a first conductive plug passing through the second substrate from the side of the fifth surface of the second substrate to the at least one conductive layer, wherein the first conductive plug is used to electrically connect the conductive layer to the pressure-sensing electrode.

A Micro-Electro Mechanical System (MEMS) pressure sensor, comprising:

• a first substrate, wherein the first substrate comprises a first surface and a second surface opposite to the first surface, and the first substrate comprises at least one conductive layer arranged on the side of the first surface of the first substrate;
• a second substrate, wherein the second substrate comprises a third surface and a fifth surface opposite to the third surface, the second substrate comprises a second base and a pressure-sensing electrode arranged on or above or in the second base, and the second substrate comprises a pressure sensing region in which the pressure-sensing electrode is arranged, the first surface of the first substrate and the third surface of the second substrate are bonded with each other;
• a cavity formed between the first substrate and the pressure sensing region of the second substrate;
• and
• a first conductive plug passing through the second substrate from the side of the fifth surface of the second substrate to the at least one conductive layer, wherein the first conductive plug is used to electrically connect the conductive layer to the pressure-sensing electrode.