Imprint apparatus and method of manufacturing article
AssigneeCanon Kabushiki Kaisha
InventorShun Takemura
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Abstract
The present invention provides an imprint apparatus which performs an imprint process of forming a pattern on an imprint material on a substrate by using a mold, the apparatus including a detection unit configured to detect an occurrence of an error while the imprint process is performed, and a control unit configured to perform error processing of ceasing the imprint process and unloading the substrate from the imprint apparatus upon curing the imprint material on the substrate when the detection unit detects the occurrence of the error before the imprint material on the substrate is cured.
Claims9
An imprint apparatus which performs an imprint process of forming a pattern on an imprint material on a substrate by using a mold, the apparatus comprising:
- a detection unit configured to detect an occurrence of an error while the imprint process is performed;
- and
- a control unit configured to perform error processing of ceasing the imprint process and unloading the substrate from the imprint apparatus upon curing the imprint material on the substrate when the detection unit detects the occurrence of the error before the imprint material on the substrate is cured.
A method of manufacturing an article, the method comprising:
- forming a pattern on a substrate using an imprint apparatus;
- and
- processing the substrate, on which the pattern has been formed, to manufacture the article,
- wherein the imprint apparatus performs an imprint process of forming a pattern on an imprint material on the substrate by using a mold and includes:
- a detection unit configured to detect an occurrence of an error while the imprint process is performed;
- and
- a control unit configured to perform error processing of ceasing the imprint process and unloading the substrate from the imprint apparatus upon curing the imprint material on the substrate when the detection unit detects the occurrence of the error before the imprint material on the substrate is cured.
Dependencies are inferred from the claim text.