Transfer device and vacuum apparatus

A transfer device, comprising a first transfer device;

• and a second transfer device,
• wherein the first transfer device comprises:
• first and second extension/contraction drive shafts for driving extension and contraction of first and second transfer mechanisms, the first and second extension/contraction drive shafts being disposed concentrically about a predetermined rotating axis as a center, and each being provided in an independently rotatable manner in a horizontal plane, and
• first and second turning drive shafts for turning the first and second transfer mechanisms, the first and second turning drive shafts being disposed concentrically about the first and second extension/contraction drive shafts,
• wherein the first transfer mechanism is configured to be driven to extend and contract by the first extension/contraction drive shaft so as to transfer a first transfer unit along a transfer object transfer direction, and the second transfer mechanism is configured to be driven to extend and contract by the second extension/contraction drive shaft so as to transfer a second transfer unit along the transfer object transfer direction,
• wherein the first and second transfer mechanisms have first and second turning drive members that are driven by the first and second turning drive shafts, respectively, and turn the first and second transfer mechanisms, respectively, about the rotating axis as a center, and
• wherein the first transfer mechanism and the second transfer mechanism are disposed opposite to each other in the transfer object transfer direction with the rotating axis in between;
• and
• wherein the second transfer device comprises third and fourth extension/contraction drive shafts for driving extension and contraction of third and fourth transfer mechanisms corresponding to the first and second transfer mechanisms, the third and forth transfer mechanisms being disposed concentrically about the rotating axis as a center and each being provided in an independently rotatable manner in a horizontal plane,
• wherein the third and fourth transfer mechanisms are disposed at height positions different from the first and second transfer mechanisms and opposite to each other in the transfer object transfer direction with the rotating axis in between, and are configured to be driven to extend and contract by the third and fourth extension/contraction drive shafts, respectively, so as to transfer third and fourth transfer units, respectively, along the transfer object transfer direction, and have a linkage mechanism connected with each of the first and second turning drive members provided to the first and second transfer mechanisms, and are configured to turn the third and fourth transfer mechanisms by the linkage mechanism about the rotating axis as a center.

A vacuum apparatus, comprising:

• a vacuum chamber;
• and
• a transfer device provided in the vacuum chamber,
• wherein the transfer device comprises:
• first and second extension/contraction drive shafts for driving extension and contraction of first and second transfer mechanisms, the first and second extension/contraction drive shafts being disposed concentrically about a predetermined rotating axis as a center and each being provided in an independently rotatable manner in a horizontal plane, and
• first and second turning drive shafts for turning the first and second transfer mechanisms, the first and second turning drive shafts being disposed concentrically about the first and second extension/contraction drive shafts,
• wherein the first transfer mechanism is configured to be driven to extend and contract by the first extension/contraction drive shaft so as to transfer a first transfer unit along a transfer object transfer direction, and the second transfer mechanism is configured to be driven to extend and contract by the second extension/contraction drive shaft so as to transfer a second transfer unit along the transfer object transfer direction,
• wherein the first and second transfer mechanisms have first and second turning drive members that are driven by the first and second turning drive shafts, respectively, and turn the first and second transfer mechanisms, respectively, about the rotating axis as a center, and
• wherein the first transfer mechanism and the second transfer mechanism are disposed opposite to each other in the transfer object transfer direction with the rotating axis in between.