Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method

A treatment liquid supply apparatus that supplies a treatment object with a solvent-containing treatment liquid for performing a liquid treatment to the treatment object, said apparatus comprising:

• a treatment liquid supply passage having one end to which a treatment liquid ejecting unit for ejecting the treatment liquid to the treatment object is provided, and having the other end to which a treatment liquid supply source is to be connected;
• a filter unit provided in the treatment liquid supply passage in order remove foreign matters in the treatment liquid, the filter unit having a filter part made of a resin;
• and
• a pretreatment mechanism that establishes a condition in which the filter part is soaked with a solvent for pretreatment,
• wherein a solubility of a resin, which constitutes the filter part of the filter unit, to the solvent for pretreatment is greater than a solubility of the resin to a solvent used in the treatment liquid.

An apparatus for heating a filter unit, wherein the filter unit is to be provided in a treatment liquid supply passage in order to remove foreign matters included in a solvent-containing treatment liquid for performing a liquid treatment to a treatment object, said apparatus comprising:

• a main body for receiving the filter unit therein;
• and
• a heating unit for heating the main body,
• wherein the heating unit includes a first storage part for storing a first reaction substance, a second storage part for storing a second reaction substance, isolated from the first storage part, that causes exothermic reaction upon contact with the first reaction substance, and an isolation releasing part that releases an isolated state of the the first and second reaction substances so as to bring them into contact with each other.

A method of pretreating a treatment liquid supply passage to eliminate foreign matters of organic matters that may be included in a solvent-containing treatment liquid for performing liquid treatment to a treatment object, said pretreatment method comprising:

• a step of supplying a solvent for pretreatment to the treatment liquid supply passage;
• and
• a step of thereafter discharging the solvent for pretreatment from the treatment liquid supply passage,
• wherein a solubility of the organic matters to the solvent for pretreatment is greater than the solubility of of the organic matters to the solvent contained the treatment liquid.