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US 2016/0233046 A1Published application
X-ray generation device
AssigneeHamamatsu Photonics K.K.
InventorsAtsushi Ishii, Naonobu Suzuki
Life of this patent
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Abstract
An X-ray generation device which can be efficiently used is provided. The X-ray generation device 1 has an electron gun 3, a target unit T, a tubular portion 5, a reflected electron detector 31, and a coil unit 9, and the target unit T includes a plurality of targets 23, and a plurality of mark portions 27 having a predetermined location relationship with the targets 23 and each having a surface area larger than a surface area of the target 23, when viewed from a normal direction to principal faces of the target unit T.
Claims7
An X-ray generation device comprising:
- an electron gun for emitting an electron beam;
- a target unit having a target buried in a substrate having principal faces opposed to each other;
- a housing at one end side of which the target unit is arranged and at the other end side opposed to the one end side of which the electron gun is arranged, the housing having an electron passage for the electron beam to pass;
- a deflector for deflecting the electron beam passing in the electron passage, so as to enable scanning on the target unit;
- and
- a signal acquisition unit for acquiring an incident signal generated based on the electron beam in the scanning on the target unit,
- wherein the target unit comprises:
- a plurality of first metal members serving as the target;
- and
- a second metal member having a predetermined location relationship with the first metal members and, when viewed from a normal direction to the principal faces, having a surface area larger than a surface area of the first metal member, and
- wherein the deflector makes the electron beam passing in the electron passage, incident to the first metal member, based on the incident signal acquired by the signal acquisition unit.
8 more elements
Dependencies are inferred from the claim text.