Forming Nanotubes
AssigneesEloret Corporation, Michael Mikio Oye
InventorMichael Mikio Oye
Life of this patent
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Abstract
A method of forming nanotubes may comprise applying a photoresist to a metal substrate, selectively exposing a first portion of the photoresist to electromagnetic radiation while not exposing a second portion to the electromagnetic radiation, removing the second portion of the photoresist from the metal substrate exposing a first portion of the metal substrate, exposing the first portion of the metal substrate to an etchant removing the first portion of the photoresist exposing a second portion of the metal substrate, and growing carbon nanotubes on the second portion of the metal substrate.
Claims20
A method of forming nanotubes, comprising:
- applying a photoresist to a metal substrate;
- selectively exposing a first portion of the photoresist to electromagnetic radiation while not exposing a second portion to the electromagnetic radiation;
- removing the second portion of the photoresist from the metal substrate exposing a first portion of the metal substrate;
- exposing the first portion of the metal substrate to an etchant;
- removing the first portion of the photoresist exposing a second portion of the metal substrate;
- and
- growing carbon nanotubes on the second portion of the metal substrate.
A method of forming an electron source with nanotubes, comprising:
- depositing a layer of photoresist onto the surface of a metal substrate;
- applying a mask to the surface of the photoresist and selectively exposing a first portion of the photoresist to electromagnetic radiation while not exposing a second portion to the electromagnetic radiation;
- removing the second portion of the photoresist from the metal substrate exposing a first portion of the metal substrate;
- exposing the first portion of the metal substrate to an etchant;
- removing the first portion of the photoresist exposing a second portion of the metal substrate;
- and
- growing nanotubes on the second portion of the metal substrate.
The method of claim 16, wherein growing nanotubes on the second portion of the metal substrate further comprises growing nanotubes on the third portion of the metal substrate wherein the density of the nanotubes grown on the second portion of the metal substrate differs from the density of nanotubes grown on the third portion of the metal substrate.
A system for forming nanotubes, comprising:
- a photoresist applicator to apply a photoresist to a metal substrate;
- an electromagnetic radiation source to selectively apply a first portion of the photoresist to electromagnetic radiation while not exposing a second portion to the electromagnetic radiation;
- an etchant applicator to expose a first portion of the metal substrate to an etchant, the first portion of metal substrate being exposed after removing the second portion of the photoresist from the metal substrate;
- and
- a carbon nanotube synthesizer to grow carbon nanotubes on the second portion of the metal substrate.
Dependencies are inferred from the claim text.