Method and apparatus for scribing silicon carbide plate
AssigneeBando Kiko Co., Ltd.
InventorKazuaki BANDO
Life of this patent
Estimating the term…
Abstract
A scribing apparatus 1 includes a horizontal table 3 on which a silicon carbide plate 2 is fixed under vacuum suction; a feed screw 5 and a Y-axis control motor 6 for moving the table 3 along a pair of guide rails 4 under scribe numerical control; a guide rail device body 7 installed above the table 3 along an X-axis direction; a carriage 8 mounted on the guide rail device body 7 so as to move in the X-axis direction while being guided; a feed screw and an X-axis control motor 9 for moving the carriage 8 in the X-axis direction under numerical control; and a scribe head 10 installed on the carriage 8.
Claims4
A silicon carbide plate scribing method comprising the steps of:
- first scribing a dent at a scribe starting point at the time of a scribing start;
- and starting scribing from within said dent.
A silicon carbide plate scribing method comprising the steps of:
- first causing a cutter wheel to rotate or swing in a state in which said cutter wheel is brought into pressure contact with a silicon carbide plate at a scribe starting point at the time of a scribing start, to thereby scribe a dent at the starting point;
- and subsequently starting scribing from within said dent.
A silicon carbide plate scribing method comprising the steps of:
- first causing a diamond scribe stylus provided separately from a cutter wheel to rotate or swing in a state in which said diamond scribe stylus is brought into pressure contact with a silicon carbide plate at a scribe starting point at the time of a scribing start, to thereby scribe a dent;
- subsequently causing said cutter wheel to be brought into pressure contact with the silicon carbide plate at the dent formed;
- and starting scribing from within said dent.
A scribing apparatus comprising:
- a scribe head having a cutter wheel and adapted to scribe a scribe line by rolling said cutter wheel in a state of being pressure contact with a silicon carbide plate;
- and a diamond stylus unit which has a diamond scribe stylus and causes said diamond scribe stylus to be brought into pressure contact with the silicon carbide plate to thereby scribe a dent.
Dependencies are inferred from the claim text.