Inductive sensor comprising integrated soft magnetic layer and method for the production thereof
AssigneeMicro-Epsilon Messtechnik GmbH & Co. KG
InventorsChristian Pfaffinger, Werner Groemmer, Karl Wisspeintner, Guenter Schallmoser, Thomas Wisspeintner
Life of this patent
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Abstract
The invention relates to a sensor element for an inductive sensor used for a displacement or distance measurement by means of a magnetic field that varies according to the distance from the measurement object but that remains temporally constant. In said sensor, thin ferromagnetic material is integrated into a substrate. The invention also relates to a sensor comprising said sensor element and to a method for producing the sensor element.
Claims23
1-19. (canceled)
Sensor element for an inductive sensor for at least one path or distance measurement using a magnetic field that changes according to the distance to the measuring object but is temporally constant, whereby thin ferromagnetic material is integrated into a substrate, whereby the sensor element features a plane coil and a soft-magnetic foil that covers the plane coil,
- wherein the coil and the foil are arranged in such a way and are designed with regard to size and form in a such a way that, over the falling slope of the permeability characteristic curve—the working area of the sensor element—a nearly linear relationship between magnet distance and measuring signal is produced.
Dependencies are inferred from the claim text.