Precursors for the production of thin oxide layers and the use thereof

Metal complex with 2-functionalised 1,3-diketones of the general formula (I)

• Ml[R1—CO—C(H)mX—CO—R2]n, (I)
• in which
• M denotes a metal atom selected from the group zinc, indium, gallium, tin, aluminium, zirconium, titanium and hafnium,
• l denotes 1 or 2,
• m denotes 0 or 1,
• n denotes 1, 2, 3 or 4,
• R1 and R2, independently of one another, denote alkyl having 1 to 8 C atoms, cycloalkyl having 3 to 7 C atoms, alkoxy having 1 to 8 C atoms and/or amino, NHR3 or NR3R4, where R3 and R4, independently of one another, denote alkyl having 1 to 8 C atoms or cycloalkyl having 3 to 7 C atoms,
• and
• X denotes hydroxyimino, nitro, sulfo, including —SO2-alkyl having 1 to 8 C atoms, phosphato, including —PO(O—R)2, where R=alkyl having 1 to 8 C atoms or alkoxy having 1 to 8 C atoms;
• stannyl —SnR3, where R=alkyl having 1 to 8 C atoms;
• mercapto —SR, where R═H, alkyl having 1 to 8 C atoms or cycloalkyl having 3 to 7 C atoms, halide, such as F, Cl, Br or I, or pseudohalide, such as —CN, —N3, —OCN, —NCO, —CNO, —SCN or —SeCN.