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US 2016/0198981 A1Published application
Strain sensor, monitoring system, and method of manufacturing thereof
AssigneeInnovative In Vivo Sensing, LLC
InventorsHilmi Volkan DEMIR, Christian Matthew PUTTLITZ, Rohat MELIK
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Abstract
Electronic devices, apparatus, systems, and methods of operating and constructing the devices, apparatus, and/or systems include a wireless sensor configured to measure strain of hardware, which can be implanted in a subject. In various embodiments, temporal measurement of the hardware strain includes monitoring changes of the resonant frequency of the sensor. The sensor can be realized as an inductively powered device that operates as an all-on-chip resonator, where the components of the sensor are biocompatible. Additional apparatus, systems, and methods are disclosed.
Claims19
A strain sensor comprising:
- a substrate;
- and
- a resonator configured as a strain gauge composed of:
- a conductive layer on the substrate in contact therewith;
- a solid dielectric material on the conductive layer in contact therewith as a dielectric capacitor;
- and
- a conductive coil on the solid dielectric material in contact therewith,
- wherein the conductive layer, the solid dielectric material, and the conductive coil of the resonator are configured to undergo strain as strain is imparted to the substrate,
- wherein the resonator is configured to be inductively powered without an incorporated power supply,
- wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating magnetic or electromagnetic field directed toward the strain sensor, and
- wherein the resonant frequency of the resonator shifts in correspondence with the strain imparted to the substrate.
8 more elements
A monitoring system comprising:
- a strain sensor comprising:
- a substrate;
- and
- a resonator configured as a strain gauge composed of:
- a conductive layer on the substrate in contact therewith;
- a solid dielectric material on the conductive layer in contact therewith as a dielectric capacitor;
- and
- a conductive coil on the solid dielectric material in contact therewith,
- wherein the conductive layer, the solid dielectric material, and the conductive coil of the resonator are configured to undergo strain as strain is imparted to the substrate,
- wherein the resonator is configured to be inductively powered without an incorporated power supply,
- wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating magnetic or electromagnetic field directed toward the strain sensor, and
- wherein the resonant frequency of the resonator shifts in correspondence with the strain imparted to the substrate;
- an electromagnetic field generator configured to generate an alternating magnetic or electromagnetic field to power the resonator;
- a receiver configured to receive electromagnetic waves reflected by the resonator in response to the resonator being excited by the generated alternating magnetic or electromagnetic field;
- a spectrum analyzer configured to determine a resonant frequency of the resonator based on the electromagnetic waves reflected by the resonator at different times over a period;
- and
- an analyzer configured to determine a temporal change in strain imparted to the substrate based on a shift in the resonant frequency of the resonator over the period.
14 more elements
A method of manufacturing a strain sensor, the method comprising the steps of:
- providing a substrate;
- and
- forming a resonator configured as a strain gauge by:
- forming a conductive layer on the substrate in contact therewith;
- forming a solid dielectric material on the conductive layer in contact therewith as a dielectric capacitor;
- and
- forming a conductive coil on the solid dielectric material in contact therewith,
- wherein the conductive layer, the solid dielectric material, and the conductive coil of the resonator are configured to undergo strain as strain is imparted to the substrate,
- wherein the resonator is configured to be inductively powered without an incorporated power supply,
- wherein the resonator is configured to reflect electromagnetic waves corresponding to a resonant frequency of the resonator in response to an alternating magnetic or electromagnetic field directed toward the strain sensor, and
- wherein the resonant frequency of the resonator shifts in correspondence with the strain imparted to the substrate.
8 more elements
Dependencies are inferred from the claim text.