RECONFIGURABLE DEVICE FOR TERAHERTZ (THz) AND INFRARED (IR) FILTERING AND MODULATION
AssigneeThe Regents of the University of Michigan
InventorsMona JARRAHI, Mehmet UNLU, Christopher W. BERRY, Shenglin LI
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Abstract
A reconfigurable device for terahertz (THz) or infrared (IR) ranges that includes a base substrate, a lower array attached to the base substrate, and an upper array attached to the base substrate and at least partially suspended over the lower array. Activation of the reconfigurable device causes the upper array to mechanically flex towards the lower array so that electrical contact is made therebetween. Methods of fabricating and operating the reconfigurable device are also provided.
Claims14
A reconfigurable device for terahertz (THz) or infrared (IR) ranges, comprising:
- a base substrate;
- a lower array attached to the base substrate;
- and
- an upper array attached to the base substrate and at least partially suspended over the lower array, wherein activation of the reconfigurable device causes the upper array to mechanically flex towards the lower array so that electrical contact is made therebetween.
A method of fabricating a reconfigurable device for terahertz (THz) or infrared (IR) ranges, comprising the steps of:
- providing a base substrate;
- fabricating a lower array with a plurality of stationary conductive elements on the base substrate;
- and
- fabricating an upper array with a plurality of flexible conductive elements on the base substrate, wherein the plurality of flexible conductive elements from the upper array are fabricated so that they are at least partially suspended over the plurality of stationary conductive elements from the lower array.
A method operating a reconfigurable device for terahertz (THz) or infrared (IR) ranges, comprising the steps of:
- providing a reconfigurable device having a lower array and an upper array attached arranged according to a plurality of unit cells;
- applying an electrical voltage to the reconfigurable device;
- and
- rearranging the structural configuration of the plurality of unit cells in response to the applied electrical voltage so that the collective magnetic response of the reconfigurable device to an incident electromagnetic wave in the terahertz (THz) or infrared (IR) range is altered.
Dependencies are inferred from the claim text.