Back to results
US 2016/0194300 A1Published application
Reagent for enhancing generation of chemical species
AssigneeToyo Gosei Co., Ltd.
InventorSatoshi Enomoto
Life of this patent
Estimating the term…
Abstract
A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.
Claims25
A reagent, the reagent being characterized by that:
- an intermediate is generated from the reagent by a feed energy;
- the intermediate enhances a generation of a chemical species from a precursor;
- a product resulting from the intermediate has a conjugation length longer than a conjugation length of the reagent;
- wherein the feed of the energy is carried out by a first irradiation of the reagent or an acceptor receiving the energy with at least one of a light of which wavelength is shorter than or equal to 15 nm and an electron beam;
- and
- wherein the generation of the chemical species from the precursor is improved by a second irradiation with a light of which wavelength is longer than or equal to 300 nm;
- wherein the reagent is selected from the group consisting of a first reagent, a second reagent, and a third reagent,
- the first reagent is represented by one of formula (I),
- wherein
- R1 is a hydrogen atom;
- R2 is a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom;
- and
- R3 is a hydrogen atom, a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom,
- the second reagent is represented by one of formula (II),
- wherein
- R1 is a hydrogen atom;
- R2 is a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom;
- R3 is a hydrogen atom, a phenyl group, an alkyl carbonyl group, an aryl carbonyl group, an alkyl group, an alkenyl group, an aralkyl group, an alkynyl group, an alkyl group containing a cyclic or poly cyclic moiety, or a substituent containing at least one atom other than carbon atom and hydrogen atom;
- and
- R4 is a protective group for a hydroxyl group or a group containing a carbon atom, and
- the third reagent includes a hydroxyl group;
- and
- a first cyclic moiety that contains a carbon atom bonded to the hydroxyl group and a hydrogen atom.
20 more elements
(canceled)
(canceled)
(canceled)
-14. (canceled)
-24. (canceled)
(canceled)
(canceled)
(canceled)
-35. (canceled)
-41. (canceled)
Dependencies are inferred from the claim text.