Sensor device for determining rotational speed of a rotatable object and turbocharger with such a sensor device

2:

• Sensor device according to claim 1, wherein the integrated silicon-on-insulator circuit (10) further comprises a copper redirection layer (35).

3:

• Sensor device according to claim 1, wherein the material of the flexible polymer substrates (24) comprises liquid crystal polymer and/or polyimide.

4:

• Sensor device according to claim 1, wherein the integrated silicon-on-insulator circuit (10) is provided with vertical electric connections (36) passing through one of the flexible polymer substrates (24).

5:

• Sensor device according to claim 1, wherein the integrated silicon-on-insulator circuit (10) is given by an ASIC.

6:

• Sensor device according to claim 1, wherein the sensor housing (21) is made of an organic polymer thermoplastic.

7:

• Sensor device according to claim 1, wherein the sensing element (15) comprises a double D coil (57), in particular a saddle-shaped double D coil.

8:

• Sensor device according to claim 1, wherein the sensing element (15) comprises an L coil (47).

9:

• Sensor device according to claim 7, wherein the double D coil or the L coil is printed on a flexible polymer substrate (24).

10:

• Turbocharger with a turbocharger housing (1) and a sensor device (20) according to claim 1, wherein a compressor wheel (2) is arranged inside the turbocharger housing (1) and the wall (1) of the turbocharger housing is provided with a recess (30) in which the sensor segment (6) of the sensor device (20) is positioned such that both the sensing element (15) and the sensor electronics (9) are located within the wall of turbocharger housing (1), wherein the mounting segment (5) of the sensor device (20) is connected to the outside surface of the wall of the turbocharger housing (1).