Mems structure with thick movable membrane
AssigneeDelfmems
InventorsAnne-Sophie Rollier, Antoine Bonnabel, Karim Segueni
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Abstract
The present invention relates to a method of manufacturing an MEMS device that comprises the steps of forming a first membrane layer over a sacrificial base layer, forming a second membrane layer over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer and forming stoppers to restrict movement of the first membrane layer. Moreover, it is provided MEMS device comprising a movable membrane comprising a first membrane layer and a second membrane layer formed over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer.
Claims20
A method of manufacturing an MEMS device comprising the steps of:
- forming a first membrane layer over a sacrificial base layer;
- forming a second membrane layer over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer;
- and
- forming stoppers to restrict movement of the first membrane layer.
A MEMS device comprising
- a movable membrane comprising a first membrane layer and a second membrane layer formed over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer.
A method for manufacturing a MEMS device comprising,
- forming a first membrane layer,
- forming a material layer, and
- patterning the material layer to form a second membrane layer and one or more stoppers.
Dependencies are inferred from the claim text.