Mems structure with multilayer membrane
AssigneeDelfmems
InventorsRenaud Robin, Nicolas Lorphelin, Karim Segueni
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Abstract
Systems and methods for a MEMS device, in particular, a MEMS switch, and the manufacture thereof are provided. In one example, said MEMS device comprises posts and a conduction (transmission) line formed over a substrate and a membrane over the posts and the conduction line. The membrane comprises a first membrane layer and a second membrane layer formed over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed.
Claims20
A method of manufacturing a MEMS device comprising:
- forming posts and a conduction line over a substrate;
- and
- forming a membrane over the posts and the conduction line comprising forming a first membrane layer and forming a second membrane layer over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the second membrane layer only partially overlaps the first membrane layer.
A MEMS device comprising
- posts and a conduction line formed over a substrate;
- and
- a membrane over the posts and the conduction line;
- wherein the membrane comprises a first membrane layer and a second membrane layer formed over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the second membrane layer only partially overlaps the first membrane layer.
A method for manufacturing a MEMS device, comprising,
- forming first, second, and third membrane layers, wherein
- the second membrane layer is formed on and only partially overlaps the third membrane layers, and
- the third membrane layer is formed on and only partially overlaps the first membrane layer.
Dependencies are inferred from the claim text.