Process for making pmr writer with non-conformal side gaps
AssigneeWestern Digital (Fremont), LLC
InventorsJINQIU ZHANG, FENG LIU, XIAOYU YANG, MING JIANG, XIAOTIAN ZHOU, ZEYU MA, HAI SUN
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Abstract
A process for manufacturing a PMR writer main pole with non-conformal side gaps is provided. The process may include depositing a stitch layer comprising a magnetic material and a second stich layer material over a substrate, forming an air-bearing surface (ABS) region in a first damascene material, and forming a yoke region in a second damascene material. The first damascene material may include Aluminium Oxide (Al2O3). The second damascene material may include Silicon Dioxide (SiO2). Side gap regions may include SiO2.
Claims20
A hard disk drive, comprising:
- at least one rotatable disk having a disk surface;
- a disk drive base;
- a spindle motor attached to the disk drive base and configured to support the disk for rotating the disk with respect to the disk drive base surface;
- and
- a PMR writer main pole configured to magnetically record data on the rotatable disk surface, the PMR writer main pole comprising:
- an air-bearing surface (ABS) region;
- a yoke region comprising Silicon Dioxide (SiO2);
- and
- non-conformal side gaps comprising SiO2.
A PMR writer main pole configured to magnetically record data on a rotatable disk surface, the PMR writer main pole comprising:
- an air-bearing surface (ABS) region;
- a yoke region comprising Silicon Dioxide (SiO2);
- and
- non-conformal side gaps comprising SiO2.
Dependencies are inferred from the claim text.