Micromechanical coriolis rate of rotation sensor

Abstract

A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis, a detection axis, and a drive axis, each disposed orthogonally to each other and a first and a second driving mass disposed in a plane parallel to the substrate. Each driving mass being rotatably connected to the substrate by means of a central suspension. The two central suspensions being disposed along the detection axis. Drive electrodes generate rotary motions of the driving masses about the drive axis at each central suspension. Elastic connecting elements are disposed on each of the driving masses on both sides of the detection axis to connect and oscillate the two driving masses to synchronize their rotary motions.

Dependencies are inferred from the claim text.