Elastic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsMitsuyoshi HIRA, Seiji KAI
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AssigneeMurata Manufacturing Co., Ltd.
InventorsMitsuyoshi HIRA, Seiji KAI
Estimating the term…
In an elastic wave device, a plurality of elastic wave elements that include IDT electrodes are provided on a piezoelectric substrate, and a support layer that surrounds the elastic wave elements is provided on the piezoelectric substrate to define hollow portions in which the elastic wave elements are located. A cover member is stacked on the support layer, so that the hollow portions, in which the elastic wave elements are located, are provided, and the support layer includes a first support layer and a second support layer. The first support layer extends along an outer peripheral edge of the piezoelectric substrate, and the second support layer is located in a region surrounded by the first support layer and disposed around the elastic wave elements so as to have the hollow portions, in which the elastic wave elements are located. A hollow path is provided between the first support layer and the second support layer and arranged to allow communication between at least two of the hollow portions.
An elastic wave device comprising:
Dependencies are inferred from the claim text.