Mems switch and method of manufacturing the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorSeong Jong CHEON
Life of this patent
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Abstract
A microelectromechanical systems (MEMS) switch includes: a signal line disposed on a substrate; a dielectric member attached to the substrate; support fixtures disposed on the substrate at opposing sides of the signal line; and a membrane having ends fixed to the support fixtures, and a protrusion-recess pattern having a corrugated structure, the membrane being configured to change a capacitance provided by the membrane and the dielectric member by being positioned adjacent to the dielectric member through a downward movement.
Claims16
A microelectromechanical systems (MEMS) switch comprising:
- a signal line disposed on a substrate;
- a dielectric member attached to the signal line;
- support fixtures disposed on the substrate at opposing sides of the signal line;
- and
- a membrane comprising ends fixed to the support fixtures, and a protrusion-recess pattern having a corrugated structure, the membrane being configured to change a capacitance provided by the membrane and the dielectric member by being positioned adjacent to the dielectric member through a downward movement.
A method of manufacturing a microelectromechanical systems (MEMS) switch, the method comprising:
- forming a signal line on a substrate;
- forming support fixtures on the substrate at opposing sides of the signal line and depositing a dielectric member on a surface of the signal line;
- forming a sacrificial layer between the support fixtures and on the dielectric member, and patterning a step portion in the sacrificial layer to form a protrusion-recess pattern;
- forming a membrane on the support fixtures and the sacrificial layer;
- and
- removing the sacrificial layer.
Dependencies are inferred from the claim text.