Pmr writer with constant side wall angle
AssigneeWestern Digital (Fremont), LLC
InventorsJinqiu ZHANG, Hongmei HAN, Feng LIU, Ming JIANG, Xiaotian ZHOU, Zeyu MA
Life of this patent
Estimating the term…
Abstract
A writer main pole for a perpendicular magnetic recording system is provided. The writer pole may have a constant sidewall angle from the ABS to yoke and may be formed out of an insulating material and a magnetic material. The sidewall angle of the yoke region may be adjusted during manufacture. The ABS region may correspond to the magnetic material and the yoke region may correspond to the insulating material. The insulating material may comprise Alumina. The magnetic material may comprise a NiFe alloy.
Claims22
A perpendicular magnetic recording writer main pole, comprising:
- a first hard mask and a second hard mask formed over the top of a layer of insulating and magnetic material formed over a substrate;
- an air-bearing surface (ABS) region formed in the magnetic material with a first sidewall angle;
- a yoke region formed in the insulating material with a second sidewall angle;
- wherein the second sidewall angle is decreased by performing a reactive ion etch (“RIE”) on the insulating material using the first hard mask.
A perpendicular magnetic recording writer main pole created by a process, the process comprising:
- depositing a first hard mask and a second hard mask over the top of a layer of insulating and magnetic material formed over a substrate;
- forming an air-bearing surface (ABS) region in the magnetic material with a first sidewall angle;
- forming a yoke region in the insulating material with a second sidewall angle;
- decreasing the second sidewall angle by performing a reactive ion etch (“RIE”) on the insulating material using the first hard mask.
Dependencies are inferred from the claim text.